IEICE Technical Committee Submission System
Conference Schedule		 Online Proceedings
[Sign in]
Tech. Rep. Archives
    [Japanese] / [English] 
( Committee/Place/Topics  ) --Press->
 
( Paper Keywords:  /  Column:Title Auth. Affi. Abst. Keyword ) --Press->

All Technical Committee Conferences  (Searched in: All Years)

Search Results: Conference Papers
 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 1 of 1  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
VLD 2014-03-04
13:50		 Okinawa Okinawa Seinen Kaikan Local Pattern Modification Method for Lithographical ECO in Double Patterning
Yutaro Miyabe, Atsushi Takahashi, Tomomi Matsui (Tokyo Inst. of Tech.), Yukihide Kohira (Univ. of Aizu), Yoko Yokoyama (Toshiba) VLD2013-149		 In advanced semiconductor manufacturing processes, even though a pattern is generated according to
a design rule, hot s... [more]		 VLD2013-149
pp.87-92
 Results 1 - 1 of 1  /   
Choose a download format for default settings. [NEW !!]
Text format pLaTeX format CSV format BibTeX format
Copyright and reproduction : All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)

[Return to Top Page]

[Return to IEICE Web Page]
The Institute of Electronics, Information and Communication Engineers (IEICE), Japan