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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
US 2020-11-05
13:00
Aichi   Effect of negative ion bombardment increased in low-pressure sputtering deposition on crystallinity and piezoelectric property of ScAlN thin film
Takumi Tominaga, Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.) US2020-43
Since the ScAlN film has much higher piezoelectric response than the AlN film, it is expected to be applied to BAW devic... [more] US2020-43
pp.1-6
CPM 2017-07-22
11:33
Hokkaido   [Invited Talk] Development of Low Damage Facing Target Sputter-deposition Processes
Yoichi Hoshi (Tokyo Polytechnic Univ.) CPM2017-38
About 43 years ago, I firstly challenged the deposition of YIG films by using a conventional sputtering system. Depositi... [more] CPM2017-38
pp.89-94
US 2015-09-03
15:20
Hokkaido   Growth of c-axis parallel oriented ZnO film by RF magnetron sputtering at low gas pressure and its application in SAW and Lamb wave devices
Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.), Jean-Claude Gerbedoen, Abdelkrim Talbi (IEMN), Mami Matsukawa (Doshisha Univ.), Philippe Pernod (IEMN) US2015-50
ZnO piezoelectric films are widely used for acoustic wave devices. In most cases the (0001) oriented ZnO films were used... [more] US2015-50
pp.25-30
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