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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ED |
2017-04-20 15:25 |
Miyagi |
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Fabrication of SnO2 film using room temperature atomic layer deposition Syunsuke Saito, Kentaro Tokoro, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ.) ED2017-5 |
Since most of the gas sensors using tin oxide (SnO2) are sintered type, there is a problem that variations in characteri... [more] |
ED2017-5 pp.17-20 |
ED |
2015-04-17 09:55 |
Miyagi |
Laboratory for Nanoelectronics and Spintronics |
Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen Kensaku Kanomata, Hisashi Ohba, P. Pungboon Pansila, Bashir Ahmmad Arima, Shigeru Kubota, Kazuhiro Hirahara, Fumihiko Hirose (Yamagata Univ.) ED2015-11 |
Room-temperature atomic layer deposition (ALD) of hafnium dioxide is developed using tetrakis(ethylmethylamino)hafnium (... [more] |
ED2015-11 pp.53-58 |
ED |
2014-04-18 09:50 |
Yamagata |
The 100th Anniversary Hall, Yamagata University |
Fabrication of hafnium oxide using room-temperature atomic layer deposition Kensaku Kanomata, Hisashi Ohba, Bashil Ahmmad Arima, Shigeru Kubota, Kazuhiro Hirahara, Fumihiko Hirose (Yamagata Univ.) ED2014-13 |
Room-temperature atomic layer deposition (ALD) of hafnium dioxide is developed using tetrakis(ethylmethylamino)hafnium (... [more] |
ED2014-13 pp.51-54 |
CPM |
2013-10-25 09:30 |
Niigata |
Niigata Univ. Satellite Campus TOKIMEITO |
Fabrication of titanium oxide using plasma excited atomic layer deposition Kensaku Kanomata, Hisashi Ohba, Katsuaki Momiyama, Takahiko Suzuki, Bashil Ahmmad, Shigeru Kubota, Kazuhiro Hirahara, Fumihiko Hirose (Yamagata Univ.) CPM2013-102 |
Room-temperature atomic layer deposition (ALD) of titanium dioxide is developed using tetrakis(dimethylamino)titanium (T... [more] |
CPM2013-102 pp.45-48 |
ED |
2013-04-19 11:10 |
Miyagi |
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Investigation of room temperature silica coating for flexible and soft materials Kensaku Kanomata, Takahiko Suzuki, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ.) ED2013-14 |
(To be available after the conference date) [more] |
ED2013-14 pp.55-57 |
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