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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2016-10-25
14:40		 Mie   Study on the photoresponse of silicon field emitter arrays (II)
Hidetaka Shimawaki (HIT), Masayoshi Nagao (AIST), Yoichiro Neo, Hidenori Mimura (Shizuoka Univ.), Fujio Wakaya, Mikio Takai (Osaka Univ.) ED2016-46		 We have fabricated silicon field emitter arrays with submicron gate opening by using etch-back technique and investigate... [more] ED2016-46
pp.13-15
ED 2010-10-25
13:25		 Kyoto   Surface state and electron emission property of silicon field emitter arrays treated by trifluoromethane plasma
Yasuhito Gotoh, Keisuke Endo, Hiroshi Tsuji (Kyoto Univ.), Junzo Ishikawa (Chubu Univ.), Shigeki Sakai (Nissin Ion Equipment) ED2010-129		 Surface state of the silicon substrate treated by trifluoromethane plasma was analyzed in order to clarify the origin of... [more] ED2010-129
pp.7-10
ED 2008-08-05
09:50		 Shizuoka Sizuoka Univ. Hamamatsu Campus Application of silicon field emitter arrays for space charge compensation of low energy ion beam
Mitsuaki Takeuchi (Innovation Plaza Kyoto, JST), Yasuhito Gotoh, Hiroshi Tsuji (Kyoto Univ.), Shigeki Sakai (Nissin Ion Equipment), Tsunenobu Kimoto, Junzo Ishikawa (Kyoto Univ.) ED2008-119		 We demonstrated a space charge compensation by using a surface-carbonized silicon field emitter array(Si:C-FEA). The Si:... [more] ED2008-119
pp.49-52
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