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Presentation |
2018-11-30 14:05
Quality improvement and characteristic evaluations of sputter-deposited a-plane AlN on r-plane sapphire Ryo Fukuta, Kanako Shojiki, Jiang Nan, Kenjiro Uesugi, Yusuke Hayashi, Xiao Shiyu, Hideto Miyake (Mie Univ.) |
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ED2018-50 CPM2018-84 LQE2018-104 Link to ES Tech. Rep. Archives: ED2018-50 CPM2018-84 LQE2018-104 |
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