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Paper Abstract and Keywords
Presentation
2006-06-22 10:55
Realization of SiON films with small ΔVfb
Daisuke Matsushita
,
Koichi Muraoka
,
Yasushi Nakasaki
,
Koichi Kato
,
Shoko Kikuchi
,
Kiwamu Sakuma
,
Yuichiro Mitani
(
toshiba R&D center
),
Mariko Takayanagi
,
Kazuhiro Eguchi
(
Semiconductor Company
)
Abstract
(in Japanese)
(See Japanese page)
(in English)
(Not available yet)
Keyword
(in Japanese)
(See Japanese page)
(in English)
/ / / / / / /
Reference Info.
IEICE Tech. Rep., vol. 106, no. 108, SDM2006-56, pp. 81-86, June 2006.
Paper #
SDM2006-56
Date of Issue
2006-06-14 (SDM)
ISSN
Print edition: ISSN 0913-5685
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Conference Information
Committee
SDM
Conference Date
2006-06-21 - 2006-06-22
Place (in Japanese)
(See Japanese page)
Place (in English)
Faculty Club, Hiroshima Univ.
Topics (in Japanese)
(See Japanese page)
Topics (in English)
Science and Technologies of Dielectric Thin Films for Future Electron Devices
Paper Information
Registration To
SDM
Conference Code
2006-06-SDM
Language
Japanese
Title (in Japanese)
(See Japanese page)
Sub Title (in Japanese)
(See Japanese page)
Title (in English)
Realization of SiON films with small ΔVfb
Sub Title (in English)
Keyword(1)
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1st Author's Name
Daisuke Matsushita
1st Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
2nd Author's Name
Koichi Muraoka
2nd Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
3rd Author's Name
Yasushi Nakasaki
3rd Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
4th Author's Name
Koichi Kato
4th Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
5th Author's Name
Shoko Kikuchi
5th Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
6th Author's Name
Kiwamu Sakuma
6th Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
7th Author's Name
Yuichiro Mitani
7th Author's Affiliation
Advanced LSI Technology Laboratory,Toshiba Corporation
(
toshiba R&D center
)
8th Author's Name
Mariko Takayanagi
8th Author's Affiliation
Semiconductor Company
(
Semiconductor Company
)
9th Author's Name
Kazuhiro Eguchi
9th Author's Affiliation
Semiconductor Company
(
Semiconductor Company
)
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Speaker
Author-1
Date Time
2006-06-22 10:55:00
Presentation Time
25 minutes
Registration for
SDM
Paper #
SDM2006-56
Volume (vol)
vol.106
Number (no)
no.108
Page
pp.81-86
#Pages
6
Date of Issue
2006-06-14 (SDM)
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