| Paper Abstract and Keywords |
| Presentation |
2007-03-15 15:50
Development of Microwave-Excited Plasma Enhanced Metal-Organic Chemical Vapor deposition System and Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Film
Ichirou Takahashi, Kiyoshi Funawa, Keita Azumi, Satoru Yamashita, Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
(Not available yet) |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
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| Reference Info. |
IEICE Tech. Rep., vol. 106, no. 593, SDM2006-260, pp. 33-37, March 2007. |
| Paper # |
SDM2006-260 |
| Date of Issue |
2007-03-08 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 |
| Download PDF |
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| Conference Information |
| Committee |
SDM |
| Conference Date |
2007-03-15 - 2007-03-15 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
SDM |
| Conference Code |
2007-03-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Development of Microwave-Excited Plasma Enhanced Metal-Organic Chemical Vapor deposition System and Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Film |
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| 1st Author's Name |
Ichirou Takahashi |
| 1st Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 2nd Author's Name |
Kiyoshi Funawa |
| 2nd Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 3rd Author's Name |
Keita Azumi |
| 3rd Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 4th Author's Name |
Satoru Yamashita |
| 4th Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 5th Author's Name |
Yasuyuki Shirai |
| 5th Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 6th Author's Name |
Masaki Hirayama |
| 6th Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 7th Author's Name |
Akinobu Teramoto |
| 7th Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 8th Author's Name |
Shigetoshi Sugawa |
| 8th Author's Affiliation |
Tohoku University (Tohoku Univ) |
| 9th Author's Name |
Tadahiro Ohmi |
| 9th Author's Affiliation |
Tohoku University (Tohoku Univ) |
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| Speaker |
Author-1 |
| Date Time |
2007-03-15 15:50:00 |
| Presentation Time |
25 minutes |
| Registration for |
SDM |
| Paper # |
SDM2006-260 |
| Volume (vol) |
vol.106 |
| Number (no) |
no.593 |
| Page |
pp.33-37 |
| #Pages |
5 |
| Date of Issue |
2007-03-08 (SDM) |