| Paper Abstract and Keywords |
| Presentation |
2007-10-30 15:50
Validation of the Effect of Full Stress Tensor in HoleTransport in Strained 65nm-node pMOSFETs Eiji Tsukuda (Renesas), Yoshinari Kamakura (Osaka Univ.), Hiroyuki Takashino, Takeshi Okagaki, Tetsuya Uchida, Takashi Hayashi, Motoaki Tanizawa, Katsumi Eikyu, Shoji Wakahara, Kiyoshi Ishikawa, Osamu Tsuchiya, Yasuo Inoue (Renesas), Kenji Taniguchi (Osaka Univ.) VLD2007-59 SDM2007-203 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We have developed a system consisting of a full-3D process simulator for stress calculation and k·pband calculation that takes into account the subband structure. Our simulations are in good agreement with the experimental data of strained Si-pMOSFETs of 65nm technology devices. This system is a powerful tool to optimize device structures with all stress components. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
strain / stress / PMOS / kp method / 65nm / simulation / / |
| Reference Info. |
IEICE Tech. Rep., vol. 107, no. 297, SDM2007-203, pp. 43-46, Oct. 2007. |
| Paper # |
SDM2007-203 |
| Date of Issue |
2007-10-23 (VLD, SDM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
VLD2007-59 SDM2007-203 |
| Conference Information |
| Committee |
SDM VLD |
| Conference Date |
2007-10-30 - 2007-10-31 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Process, Device, Circuit Simulation, etc. |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2007-10-SDM-VLD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Validation of the Effect of Full Stress Tensor in HoleTransport in Strained 65nm-node pMOSFETs |
| Sub Title (in English) |
|
| Keyword(1) |
strain |
| Keyword(2) |
stress |
| Keyword(3) |
PMOS |
| Keyword(4) |
kp method |
| Keyword(5) |
65nm |
| Keyword(6) |
simulation |
| Keyword(7) |
|
| Keyword(8) |
|
| 1st Author's Name |
Eiji Tsukuda |
| 1st Author's Affiliation |
Renesas Technology (Renesas) |
| 2nd Author's Name |
Yoshinari Kamakura |
| 2nd Author's Affiliation |
Osaka University (Osaka Univ.) |
| 3rd Author's Name |
Hiroyuki Takashino |
| 3rd Author's Affiliation |
Renesas Technology (Renesas) |
| 4th Author's Name |
Takeshi Okagaki |
| 4th Author's Affiliation |
Renesas Technology (Renesas) |
| 5th Author's Name |
Tetsuya Uchida |
| 5th Author's Affiliation |
Renesas Technology (Renesas) |
| 6th Author's Name |
Takashi Hayashi |
| 6th Author's Affiliation |
Renesas Technology (Renesas) |
| 7th Author's Name |
Motoaki Tanizawa |
| 7th Author's Affiliation |
Renesas Technology (Renesas) |
| 8th Author's Name |
Katsumi Eikyu |
| 8th Author's Affiliation |
Renesas Technology (Renesas) |
| 9th Author's Name |
Shoji Wakahara |
| 9th Author's Affiliation |
Renesas Technology (Renesas) |
| 10th Author's Name |
Kiyoshi Ishikawa |
| 10th Author's Affiliation |
Renesas Technology (Renesas) |
| 11th Author's Name |
Osamu Tsuchiya |
| 11th Author's Affiliation |
Renesas Technology (Renesas) |
| 12th Author's Name |
Yasuo Inoue |
| 12th Author's Affiliation |
Renesas Technology (Renesas) |
| 13th Author's Name |
Kenji Taniguchi |
| 13th Author's Affiliation |
Osaka University (Osaka Univ.) |
| 14th Author's Name |
|
| 14th Author's Affiliation |
() |
| 15th Author's Name |
|
| 15th Author's Affiliation |
() |
| 16th Author's Name |
|
| 16th Author's Affiliation |
() |
| 17th Author's Name |
|
| 17th Author's Affiliation |
() |
| 18th Author's Name |
|
| 18th Author's Affiliation |
() |
| 19th Author's Name |
|
| 19th Author's Affiliation |
() |
| 20th Author's Name |
|
| 20th Author's Affiliation |
() |
| 21st Author's Name |
|
| 21st Author's Affiliation |
() |
| 22nd Author's Name |
|
| 22nd Author's Affiliation |
() |
| 23rd Author's Name |
|
| 23rd Author's Affiliation |
() |
| 24th Author's Name |
|
| 24th Author's Affiliation |
() |
| 25th Author's Name |
|
| 25th Author's Affiliation |
() |
| 26th Author's Name |
/ / |
| 26th Author's Affiliation |
()
() |
| 27th Author's Name |
/ / |
| 27th Author's Affiliation |
()
() |
| 28th Author's Name |
/ / |
| 28th Author's Affiliation |
()
() |
| 29th Author's Name |
/ / |
| 29th Author's Affiliation |
()
() |
| 30th Author's Name |
/ / |
| 30th Author's Affiliation |
()
() |
| 31st Author's Name |
/ / |
| 31st Author's Affiliation |
()
() |
| 32nd Author's Name |
/ / |
| 32nd Author's Affiliation |
()
() |
| 33rd Author's Name |
/ / |
| 33rd Author's Affiliation |
()
() |
| 34th Author's Name |
/ / |
| 34th Author's Affiliation |
()
() |
| 35th Author's Name |
/ / |
| 35th Author's Affiliation |
()
() |
| 36th Author's Name |
/ / |
| 36th Author's Affiliation |
()
() |
| Speaker |
Author-1 |
| Date Time |
2007-10-30 15:50:00 |
| Presentation Time |
25 minutes |
| Registration for |
SDM |
| Paper # |
VLD2007-59, SDM2007-203 |
| Volume (vol) |
vol.107 |
| Number (no) |
no.295(VLD), no.297(SDM) |
| Page |
pp.43-46 |
| #Pages |
4 |
| Date of Issue |
2007-10-23 (VLD, SDM) |