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Paper Abstract and Keywords
Presentation 2007-11-02 09:00
Improvement of SOI-based high-mesa waveguides for compact breath-sensing system
Kosuke Kameyama, Yasunari Matsunaga, Kiichi Hamamoto (Kyushu University) OCS2007-57 OPE2007-112 LQE2007-98
Abstract (in Japanese) (See Japanese page) 
(in English) For the development of compact health-check devices, we have researched on breath-sensing system by using infrared absorption spectroscopy. The NLD (Magnetic Neutral Loop Discharge) plasma etching method was exploited for loss reduction to fabricating the high-mesa waveguides on SOI substrate. As a result, about 50% loss reduction was achieved compared to the waveguide fabricated by using conventional RIE (Reactive Ion Etching) method. Moreover, for improvement of the gas-phase light-distribution-ratio, we have improved the structure of multiply arrayed high-mesa waveguide, which is designed to use as sensing waveguides. As a result, high light-distribution-ratio of 89.3% was obtained in the structure of very narrow waveguide spacing of around 65nm with the waveguide with of around 200nm.
Keyword (in Japanese) (See Japanese page) 
(in English) Optical waveguides / SOI-substrate / Photonic integrated circuit / multiply arrayed high-mesa waveguide / Bio-sensors / Breath-sensor / /  
Reference Info. IEICE Tech. Rep., vol. 107, no. 301, OPE2007-112, pp. 81-85, Nov. 2007.
Paper # OPE2007-112 
Date of Issue 2007-10-25 (OCS, OPE, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF OCS2007-57 OPE2007-112 LQE2007-98

Conference Information
Committee LQE OPE OCS  
Conference Date 2007-11-01 - 2007-11-02 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OPE 
Conference Code 2007-11-LQE-OPE-OCS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Improvement of SOI-based high-mesa waveguides for compact breath-sensing system 
Sub Title (in English)  
Keyword(1) Optical waveguides  
Keyword(2) SOI-substrate  
Keyword(3) Photonic integrated circuit  
Keyword(4) multiply arrayed high-mesa waveguide  
Keyword(5) Bio-sensors  
Keyword(6) Breath-sensor  
Keyword(7)  
Keyword(8)  
1st Author's Name Kosuke Kameyama  
1st Author's Affiliation Kyushu University (Kyushu University)
2nd Author's Name Yasunari Matsunaga  
2nd Author's Affiliation Kyushu University (Kyushu University)
3rd Author's Name Kiichi Hamamoto  
3rd Author's Affiliation Kyushu University (Kyushu University)
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Speaker Author-1 
Date Time 2007-11-02 09:00:00 
Presentation Time 25 minutes 
Registration for OPE 
Paper # OCS2007-57, OPE2007-112, LQE2007-98 
Volume (vol) vol.107 
Number (no) no.300(OCS), no.301(OPE), no.302(LQE) 
Page pp.81-85 
#Pages 5 
Date of Issue 2007-10-25 (OCS, OPE, LQE) 

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