| Paper Abstract and Keywords |
| Presentation |
2007-12-14 16:30
Electric-Field Drive Optical Modulator Using Si Ring Resonator
Tomohiro Tokunaga, Yuichiro Tanushi, Yoshiteru Amemiya, Shin Yokoyama (Hiroshima Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
Multimode Si ring resonators (20um in diameter and resonance wavelength of 1500nm) were fabricated on SOI wafers. The waveguide width is 0.6～1.0um, and the thickness is 0.3um. The waveguide was covered with LPCVD Si3N4 film (0.26um) deposited at 750℃ and LPCVD TEOS SiO2 film deposited at 700℃, and the mechanical stress was induced. The electric field in the vertical direction was applied to the Si waveguide through the bottom cladding layer (1um thick SiO2). The optical output from the drop port at the resonance wavelength was decreased by applied voltage. At a wavelength of 1501.6nm, the optical modulation of 30% was obtained at 200V. The resonance wavelength shift toward short wavelength side was also observed. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Si-ring resonator / Optical modulation / Electiric-field drive / Carrier concentration modulation / LPCVD Si3N4 / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 107, no. 389, OPE2007-143, pp. 41-46, Dec. 2007. |
| Paper # |
OPE2007-143 |
| Date of Issue |
2007-12-07 (OPE) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
| Download PDF |
|
| Conference Information |
| Committee |
OPE |
| Conference Date |
2007-12-14 - 2007-12-14 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
OPE |
| Conference Code |
2007-12-OPE |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Electric-Field Drive Optical Modulator Using Si Ring Resonator |
| Sub Title (in English) |
|
| Keyword(1) |
Si-ring resonator |
| Keyword(2) |
Optical modulation |
| Keyword(3) |
Electiric-field drive |
| Keyword(4) |
Carrier concentration modulation |
| Keyword(5) |
LPCVD Si3N4 |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Tomohiro Tokunaga |
| 1st Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 2nd Author's Name |
Yuichiro Tanushi |
| 2nd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 3rd Author's Name |
Yoshiteru Amemiya |
| 3rd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 4th Author's Name |
Shin Yokoyama |
| 4th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2007-12-14 16:30:00 |
| Presentation Time |
25 minutes |
| Registration for |
OPE |
| Paper # |
OPE2007-143 |
| Volume (vol) |
vol.107 |
| Number (no) |
no.389 |
| Page |
pp.41-46 |
| #Pages |
6 |
| Date of Issue |
2007-12-07 (OPE) |