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Paper Abstract and Keywords
Presentation 2008-07-11 12:20
The Data Analysis Technique of the Atomic Force Microscopy for the Atomically Flat Silicon Surface
Masahiro Konda, Akinobu Teramoto, Tomoyuki Suwa, Rihito Kuroda, Tadahiro Ohmi (Tohoku Univ.) ED2008-89 SDM2008-108
Abstract (in Japanese) (See Japanese page) 
(in English) Atomically flat (100) silicon surface constructed with atomic terraces and steps is realized by argon annealing at 1200℃ on (100) crystal orientation large diameter wafers with precisely controlled tilt angle. An atomic terraces and steps of (100) silicon surface can be measured as an image data by the atomic force microscopy (AFM). In order to discuss the flatness and the uniformity of the atomically flat silicon surface, it is important to evaluate the roughness of each terrace. In this paper, the data analysis technique of the atomic terraces and steps of (100) silicon surface will be proposed.
Keyword (in Japanese) (See Japanese page) 
(in English) tomically flat (100) silicon wafer / off direction angle / off angle / AFM / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 122, SDM2008-108, pp. 265-269, July 2008.
Paper # SDM2008-108 
Date of Issue 2008-07-02 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2008-89 SDM2008-108

Conference Information
Committee SDM ED  
Conference Date 2008-07-09 - 2008-07-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Kaderu２・７ 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2008 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 
Paper Information
Registration To SDM 
Conference Code 2008-07-SDM-ED 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The Data Analysis Technique of the Atomic Force Microscopy for the Atomically Flat Silicon Surface 
Sub Title (in English)  
Keyword(1) tomically flat (100) silicon wafer  
Keyword(2) off direction angle  
Keyword(3) off angle  
Keyword(4) AFM  
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1st Author's Name Masahiro Konda  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Akinobu Teramoto  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Tomoyuki Suwa  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Rihito Kuroda  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Tadahiro Ohmi  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2008-07-11 12:20:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # ED2008-89, SDM2008-108 
Volume (vol) vol.108 
Number (no) no.121(ED), no.122(SDM) 
Page pp.265-269 
#Pages 5 
Date of Issue 2008-07-02 (ED, SDM) 

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