| Paper Abstract and Keywords |
| Presentation |
2008-10-09 13:30
Fabrication of Co-Pt Dot Array with 1 Tbit/in2 for Bit Patterned Media Yuji Kondo, Takashi Chiba, Jun Ariake, Kaori Taguchi (Akita Pref. R&D Center), Motohiro Suzuki, Naomi Kawamura (JASRI), Zulfakri Bin Mohamad, Sumio Hosaka (Gunma Univ.), Takashi Hasegawa, Shunji Ishio (AKita Univ.), Naoki Honda (Tohoku Inst. of Technol.) MR2008-19 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We fabricated Co-Pt magnetic dot arrays using an electron beam writing and a low-energy ion etching in order to prevent from the deterioration of the magnetic properties. By comparing the results of X-ray magnetic circular dichroism measurement and micro magnetic simulation, it was found that the etching using low-energy ions cause little damage on not only the magnetization but also the anisotropy field. These results demonstrate the effectiveness of the etching using low-energy ions for realization of bit-patterned media with an areal density of 1 Tbit/in2. Furthermore, the magnetic isolation between the dots in the magnetic dot array with the dot pitch of 30 nm was confirmed by SEM and MFM observations. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Bit-patterned media / Areal density of 1 Tbit/in2 / Low-energy ion etching / / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 108, Oct. 2008. |
| Paper # |
|
| Date of Issue |
2008-10-02 (MR) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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| Download PDF |
MR2008-19 |