| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2009-04-17 16:00 MEMS Mirror Array Module for Wavelength Selective Switches (WSS) Mitsuo Usui, Shingo Uchiyama, Etsu Hashimoto, Koichi Hadama, Yuzo Ishii, Nobuaki Matsuura, Tomomi Sakata, Nobuhiro Shimoyama, Tohru Matsuura, Fusao Shimokawa (NTT Corp.)  R2009-7 CPM2009-7 OPE2009-7 Link to ES Tech. Rep. Archives: CPM2009-7 OPE2009-7 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We developed a new two-axis microelectromechanical-systems (MEMS) mirror array module for wavelength selective switches (WSS). This MEMS mirror array module has a suitable structure for narrow-pitch and high fill-factor. We designed a new electrode structure to reduce electric interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small sealing package and a high density, flexible, electrical interface. We fabricated a 50ch-MEMS mirror array module using these technologies, and confirmed that the module has good characteristics. We also confirmed the electric interference reduction in the fabricated MEMS mirror array module. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Wavelength Selective Switches (WSS) / MEMS / Mirror Array / Electrical Interference / Packaging Technology / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 8, OPE2009-7, pp. 35-39, April 2009. | |
| Paper # | OPE2009-7 | |
| Date of Issue | 2009-04-10 (R, CPM, OPE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | R2009-7 CPM2009-7 OPE2009-7 Link to ES Tech. Rep. Archives: CPM2009-7 OPE2009-7 |
|
| Conference Information | |
| Committee | OPE CPM R |
| Conference Date | 2009-04-17 - 2009-04-17 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | OPE |
| Conference Code | 2009-04-OPE-CPM-R |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MEMS Mirror Array Module for Wavelength Selective Switches (WSS) |
| Sub Title (in English) | |
| Keyword(1) | Wavelength Selective Switches (WSS) |
| Keyword(2) | MEMS |
| Keyword(3) | Mirror Array |
| Keyword(4) | Electrical Interference |
| Keyword(5) | Packaging Technology |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Mitsuo Usui |
| 1st Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 2nd Author's Name | Shingo Uchiyama |
| 2nd Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 3rd Author's Name | Etsu Hashimoto |
| 3rd Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 4th Author's Name | Koichi Hadama |
| 4th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 5th Author's Name | Yuzo Ishii |
| 5th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 6th Author's Name | Nobuaki Matsuura |
| 6th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 7th Author's Name | Tomomi Sakata |
| 7th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 8th Author's Name | Nobuhiro Shimoyama |
| 8th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 9th Author's Name | Tohru Matsuura |
| 9th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 10th Author's Name | Fusao Shimokawa |
| 10th Author's Affiliation | NTT Corporation. (NTT Corp.) |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2009-04-17 16:00:00 |
| Presentation Time | 25 minutes |
| Registration for | OPE |
| Paper # | R2009-7, CPM2009-7, OPE2009-7 |
| Volume (vol) | vol.109 |
| Number (no) | no.6(R), no.7(CPM), no.8(OPE) |
| Page | pp.35-39 |
| #Pages | 5 |
| Date of Issue | 2009-04-10 (R, CPM, OPE) |
[Return to Top Page]