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Paper Abstract and Keywords
Presentation 2009-07-23 13:25
Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition
Hiroaki Usui, Shyunsuke Sotowa, Kuniaki Tanaka, Kazuo Senda (Tokyo Univ. Agricul. & Technol.) OME2009-29
Abstract (in Japanese) (See Japanese page) 
(in English) A new method of polymer deposition was developed by combining physical vapor deposition of acryl monomer and ion irradiation to the substrate. In a high-vacuum chamber, zinc acrylate (ZnAc) monomer was evaporated at a deposition rate of 0.8 nm/min, while nitrogen ions were irradiated on the substrate surface at a current density of 0.5 A/cm2 and energy of 500 to 2000 eV from an electron-bombardment type ion source. The films were prepared on Au-coated glass plates and PET films. Infrared spectra of the deposited films showed that the absorption of vinyl group decreases with increasing ion energy. It was also found that the solubility of the film to an organic solvent decreases and film surface roughness is improved with increasing ion energy. These results suggest that ion irradiation can assist the polymerization of deposited monomer, and is effective for preparing uniform and smooth polymeric thin films.
Keyword (in Japanese) (See Japanese page) 
(in English) ion irradiation / deposition polymerization / polymer thin film / acryl monomer / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 147, OME2009-29, pp. 5-8, July 2009.
Paper # OME2009-29 
Date of Issue 2009-07-16 (OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee OME  
Conference Date 2009-07-23 - 2009-07-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Karuizawa Kensyujyo, Kato Foundation for Promotion of Science 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Applications of Organic and Composite Films, etc. 
Paper Information
Registration To OME 
Conference Code 2009-07-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation of Polymeric Thin Films by Ion-Assisted Vapor Deposition 
Sub Title (in English)  
Keyword(1) ion irradiation  
Keyword(2) deposition polymerization  
Keyword(3) polymer thin film  
Keyword(4) acryl monomer  
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1st Author's Name Hiroaki Usui  
1st Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
2nd Author's Name Shyunsuke Sotowa  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
3rd Author's Name Kuniaki Tanaka  
3rd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
4th Author's Name Kazuo Senda  
4th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
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Speaker Author-1 
Date Time 2009-07-23 13:25:00 
Presentation Time 25 minutes 
Registration for OME 
Paper # OME2009-29 
Volume (vol) vol.109 
Number (no) no.147 
Page pp.5-8 
#Pages 4 
Date of Issue 2009-07-16 (OME) 

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