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Paper Abstract and Keywords
Presentation 2009-09-30 11:45
Characterization of ZnO Polycrystalline Films on Silica Glass by the LFB Ultrasonic Material Characterization System
Takanori Kondo, Sho Yoshida, Yuusuke Kourai, Yuji Ohashi, Mototaka Arakawa, Jun-ichi Kushibiki (Tohoku Univ.), Satoshi Fujii (SEIKO EPSON) US2009-53
Abstract (in Japanese) (See Japanese page) 
(in English) We evaluated several ZnO polycrystalline films with different thicknesses fabricated on silica glass substrates by DC sputtering and RF magnetron sputtering methods using a line-focus-beam ultrasonic material characterization (LFB-UMC) system. We measured fH (product of frequency f and film thickness H) dependences of leaky surface acoustic wave (LSAW) velocities from 100 to 300 MHz for each ZnO-film specimen. The measured results exhibited an fH dependence similar to the calculated ones. The LSAW velocities decreased from 3424 m/s for silica glass to 2672 m/s for Z-cut ZnO single crystal as fH increased. The measured LSAW velocities became lower than the calculated ones: decreasing of 27.2 m/s for the RF-ZnO film and 42.6 m/s for the DC-ZnO film from a calculated value of 2672.1 m/s at fH=1680 Hz·m. These velocity decreases were explained due to decreases in elastic constant associated with ZnO polycrystalline film structure: about 6% for the DC-ZnO film and about 3% for the RF-ZnO film. We also measured LSAW velocity distributions at 225 MHz and obtained a large velocity variation of about 22 m/s for a 4-mm-thick DC-ZnO film specimen. We estimated film thickness distributions from the fH dependence of LSAW velocities, resulting in about 0.66 µm for the DC-ZnO film and about 0.04 µm for the RF-ZnO film. We demonstrated that our ultrasonic method is useful for evaluating significant difference in acoustic properties between two ZnO films with different c-axis orientations fabricated by different sputtering methods.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO polycrystalline film / DC sputtering method / RF magnetron sputtering method / line-focus-beam ultrasonic material characterization system / leaky surface acoustic wave velocity / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 213, US2009-53, pp. 89-94, Sept. 2009.
Paper # US2009-53 
Date of Issue 2009-09-22 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2009-09-29 - 2009-09-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Noboribetsu Grand Hotel 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2009-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Characterization of ZnO Polycrystalline Films on Silica Glass by the LFB Ultrasonic Material Characterization System 
Sub Title (in English)  
Keyword(1) ZnO polycrystalline film  
Keyword(2) DC sputtering method  
Keyword(3) RF magnetron sputtering method  
Keyword(4) line-focus-beam ultrasonic material characterization system  
Keyword(5) leaky surface acoustic wave velocity  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Takanori Kondo  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Sho Yoshida  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Yuusuke Kourai  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Yuji Ohashi  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Mototaka Arakawa  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Jun-ichi Kushibiki  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Satoshi Fujii  
7th Author's Affiliation SEIKO EPSON CORPORATION (SEIKO EPSON)
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Speaker Author-1 
Date Time 2009-09-30 11:45:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2009-53 
Volume (vol) vol.109 
Number (no) no.213 
Page pp.89-94 
#Pages 6 
Date of Issue 2009-09-22 (US) 

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