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Paper Abstract and Keywords
Presentation 2010-02-05 15:15
Chip-Level and Package-Level Seamless Interconnect Technologies for Advanced Packaging
Shintaro Yamamichi, Kentaro Mori, Katsumi Kikuchi, Hideya Murai, D. Ohshima, Y. Nakashima (NEC), Kouji Soejima, Masaya Kawano (NEC Electronics), Tomoo Murakami (NEC) SDM2009-189
Abstract (in Japanese) (See Japanese page) 
(in English) Interposer-process-oriented thick-Cu-wiring technologies have been developed. Cu wiring thickness is 5 to 10 um, and interlayer dielectric is organic resin. Chip-level seamless interconnects are realized using a resin CMP process, and reliability on a flip-chip ball grid array (FCBGA) package is confirmed with these interconnects. Package-level seamless interconnects are formed by embedding a thinned CPU chip into a resin on Cu base plate. This seamless package is thinner, and has lower thermal resistance and better power delivery, compared to a conventional FCBGA package.
Keyword (in Japanese) (See Japanese page) 
(in English) Seamless / Multi-layer wiring / Superconnect / Embedded active / Interposer / Packaging / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 412, SDM2009-189, pp. 43-48, Feb. 2010.
Paper # SDM2009-189 
Date of Issue 2010-01-29 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2010-02-05 - 2010-02-05 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2010-02-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Chip-Level and Package-Level Seamless Interconnect Technologies for Advanced Packaging 
Sub Title (in English)  
Keyword(1) Seamless  
Keyword(2) Multi-layer wiring  
Keyword(3) Superconnect  
Keyword(4) Embedded active  
Keyword(5) Interposer  
Keyword(6) Packaging  
Keyword(7)  
Keyword(8)  
1st Author's Name Shintaro Yamamichi  
1st Author's Affiliation NEC Corporation (NEC)
2nd Author's Name Kentaro Mori  
2nd Author's Affiliation NEC Corporation (NEC)
3rd Author's Name Katsumi Kikuchi  
3rd Author's Affiliation NEC Corporation (NEC)
4th Author's Name Hideya Murai  
4th Author's Affiliation NEC Corporation (NEC)
5th Author's Name D. Ohshima  
5th Author's Affiliation NEC Corporation (NEC)
6th Author's Name Y. Nakashima  
6th Author's Affiliation NEC Corporation (NEC)
7th Author's Name Kouji Soejima  
7th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
8th Author's Name Masaya Kawano  
8th Author's Affiliation NEC Electronics Corporation (NEC Electronics)
9th Author's Name Tomoo Murakami  
9th Author's Affiliation NEC Corporation (NEC)
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Speaker Author-1 
Date Time 2010-02-05 15:15:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2009-189 
Volume (vol) vol.109 
Number (no) no.412 
Page pp.43-48 
#Pages
Date of Issue 2010-01-29 (SDM) 


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