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Paper Abstract and Keywords
Presentation 2010-06-22 13:25
The Crystalline Structures and Electrical Properties of PrAlO formed by Atomic Layer Deposition.
Kazuya Furuta, Wakana Takeuchi, Mitsuo Sakashita, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima (Nagoya Univ.) SDM2010-40
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 90, SDM2010-40, pp. 39-42, June 2010.
Paper # SDM2010-40 
Date of Issue 2010-06-15 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2010-40

Conference Information
Committee SDM  
Conference Date 2010-06-22 - 2010-06-22 
Place (in Japanese) (See Japanese page) 
Place (in English) An401・402 Inst. Indus. Sci., The Univ. of Tokyo 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Science and Technology for Dielectric Thin Films for MIS Devices 
Paper Information
Registration To SDM 
Conference Code 2010-06-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The Crystalline Structures and Electrical Properties of PrAlO formed by Atomic Layer Deposition. 
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1st Author's Name Kazuya Furuta  
1st Author's Affiliation Nagoya University (Nagoya Univ.)
2nd Author's Name Wakana Takeuchi  
2nd Author's Affiliation Nagoya University (Nagoya Univ.)
3rd Author's Name Mitsuo Sakashita  
3rd Author's Affiliation Nagoya University (Nagoya Univ.)
4th Author's Name Hiroki Kondo  
4th Author's Affiliation Nagoya University (Nagoya Univ.)
5th Author's Name Osamu Nakatsuka  
5th Author's Affiliation Nagoya University (Nagoya Univ.)
6th Author's Name Shigeaki Zaima  
6th Author's Affiliation Nagoya University (Nagoya Univ.)
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Speaker Author-1 
Date Time 2010-06-22 13:25:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2010-40 
Volume (vol) vol.110 
Number (no) no.90 
Page pp.39-42 
#Pages 4 
Date of Issue 2010-06-15 (SDM) 

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