講演抄録/キーワード |
講演名 |
2010-06-30 15:30
Fabrication of InP/InGaAs DHBTs with buried SiO2 wires ○Naoaki Takebe・Takashi Kobayashi・Hiroyuki Suzuki・Yasuyuki Miyamoto・Kazuhito Furuya(Tokyo Inst. of Tech.) ED2010-69 SDM2010-70 エレソ技報アーカイブへのリンク:ED2010-69 SDM2010-70 |
抄録 |
(和) |
In this paper, we report the fabrication and device characteristics of InP/InGaAs double heterojunction bipolar transistors (DHBTs) with buried SiO2 wires. The SiO2 wires were buried in the collector and subcollector layers by metalorganic chemical vapor deposition toward reduction of the base-collector capacitance under the base electrode. A current gain of 22 was obtained at a collector current density of 1.25 MA/cm2 for a DHBT with an emitter width of 400 nm. The DC characteristics of DHBTs with buried SiO2 wires were the same as those of DHBTs without buried SiO2 wires on the same substrate. A current gain cutoff frequency (fT) of 213 GHz and a maximum oscillation frequency (fmax) of 100 GHz were obtained at an emitter current density of 725 kA/cm2. |
(英) |
In this paper, we report the fabrication and device characteristics of InP/InGaAs double heterojunction bipolar transistors (DHBTs) with buried SiO2 wires. The SiO2 wires were buried in the collector and subcollector layers by metalorganic chemical vapor deposition toward reduction of the base-collector capacitance under the base electrode. A current gain of 22 was obtained at a collector current density of 1.25 MA/cm2 for a DHBT with an emitter width of 400 nm. The DC characteristics of DHBTs with buried SiO2 wires were the same as those of DHBTs without buried SiO2 wires on the same substrate. A current gain cutoff frequency (fT) of 213 GHz and a maximum oscillation frequency (fmax) of 100 GHz were obtained at an emitter current density of 725 kA/cm2. |
キーワード |
(和) |
/ / / / / / / |
(英) |
heterojunction bipolar transistor / InP / MOCVD / CBr4 / / / / |
文献情報 |
信学技報, vol. 110, no. 109, ED2010-69, pp. 75-79, 2010年6月. |
資料番号 |
ED2010-69 |
発行日 |
2010-06-23 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
著作権に ついて |
技術研究報告に掲載された論文の著作権は電子情報通信学会に帰属します.(許諾番号:10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
PDFダウンロード |
ED2010-69 SDM2010-70 エレソ技報アーカイブへのリンク:ED2010-69 SDM2010-70 |