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Paper Abstract and Keywords
Presentation 2010-06-30 17:10
Electrical Characteristics of Atomic Layer Deposited Tungsten Nitride Diffusion Barrier for Cu Interconnects
Yong Tae Kim (KIST), Eui Bok Lee (Koria Univ./KIST), Young Hwan Kim, Chun Keun Kim (KIST), Byeong Kwon Ju (Koria Univ.) ED2010-65 SDM2010-66
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 110, no. 109, ED2010-65, pp. 61-63, June 2010.
Paper # ED2010-65 
Date of Issue 2010-06-23 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2010-65 SDM2010-66

Conference Information
Committee ED SDM  
Conference Date 2010-06-30 - 2010-07-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokyo Inst. of Tech. Ookayama Campus 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2010 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 
Paper Information
Registration To ED 
Conference Code 2010-06-ED-SDM 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electrical Characteristics of Atomic Layer Deposited Tungsten Nitride Diffusion Barrier for Cu Interconnects 
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1st Author's Name Yong Tae Kim  
1st Author's Affiliation Korea Institute of Science and Technology (KIST)
2nd Author's Name Eui Bok Lee  
2nd Author's Affiliation Koria University/korea Institute od Science and Technology (Koria Univ./KIST)
3rd Author's Name Young Hwan Kim  
3rd Author's Affiliation Korea Institute of Science and Technology (KIST)
4th Author's Name Chun Keun Kim  
4th Author's Affiliation Korea Institute of Science and Technology (KIST)
5th Author's Name Byeong Kwon Ju  
5th Author's Affiliation Koria University (Koria Univ.)
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Speaker Author-1 
Date Time 2010-06-30 17:10:00 
Presentation Time 15 minutes 
Registration for ED 
Paper # ED2010-65, SDM2010-66 
Volume (vol) vol.110 
Number (no) no.109(ED), no.110(SDM) 
Page pp.61-63 
#Pages 3 
Date of Issue 2010-06-23 (ED, SDM) 

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