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Paper Abstract and Keywords
Presentation 2010-10-21 14:00
[Invited Talk] Channel strain evaluation for advanced LSI
Atsushi Ogura, Daisuke Kosemura, Munehisa Takei, Motohiro Tomita (Meiji Univ.) SDM2010-152 Link to ES Tech. Rep. Archives: SDM2010-152
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 110, no. 241, SDM2010-152, pp. 1-6, Oct. 2010.
Paper # SDM2010-152 
Date of Issue 2010-10-14 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2010-152 Link to ES Tech. Rep. Archives: SDM2010-152

Conference Information
Committee SDM  
Conference Date 2010-10-21 - 2010-10-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Semiconductor process science and new technology 
Paper Information
Registration To SDM 
Conference Code 2010-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Channel strain evaluation for advanced LSI 
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1st Author's Name Atsushi Ogura  
1st Author's Affiliation Meiji University (Meiji Univ.)
2nd Author's Name Daisuke Kosemura  
2nd Author's Affiliation Meiji University (Meiji Univ.)
3rd Author's Name Munehisa Takei  
3rd Author's Affiliation Meiji University (Meiji Univ.)
4th Author's Name Motohiro Tomita  
4th Author's Affiliation Meiji University (Meiji Univ.)
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Date Time 2010-10-21 14:00:00 
Presentation Time 60 minutes 
Registration for SDM 
Paper # SDM2010-152 
Volume (vol) vol.110 
Number (no) no.241 
Page pp.1-6 
#Pages
Date of Issue 2010-10-14 (SDM) 


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