| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2010-11-12 11:20 Development of Automated System of Ultra-Accelerated Quantum Chemical Molecular Dynamics Method and Oxidation Simulation of Silicon Surface Hideyuki Tsuboi, Kenji Inaba, Mariko Ise, Yukie Hayashi, Yuka Suzuki, Hiromi Sato, Yukiko Obara, Ryo Nagumo, Ryuji Miura, Ai Suzuki, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Akira Miyamoto (Tohoku)  SDM2010-178 Link to ES Tech. Rep. Archives: SDM2010-178 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Using our newly developed automated system of ultra-accelerated quantum chemical molecular dynamics method, we have investigated the initial process for dry, wet and radical oxidation reaction of silicon surface. In this report, we have analyzed the behavior of reactant molecules during the surface chemical reaction | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Silicon surface / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 274, SDM2010-178, pp. 41-43, Nov. 2010. | |
| Paper # | SDM2010-178 | |
| Date of Issue | 2010-11-04 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2010-178 Link to ES Tech. Rep. Archives: SDM2010-178 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2010-11-11 - 2010-11-12 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit Simulations, etc |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2010-11-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Automated System of Ultra-Accelerated Quantum Chemical Molecular Dynamics Method and Oxidation Simulation of Silicon Surface |
| Sub Title (in English) | |
| Keyword(1) | Silicon surface |
| Keyword(2) | |
| Keyword(3) | |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hideyuki Tsuboi |
| 1st Author's Affiliation | Tohoku University (Tohoku) |
| 2nd Author's Name | Kenji Inaba |
| 2nd Author's Affiliation | Tohoku University (Tohoku) |
| 3rd Author's Name | Mariko Ise |
| 3rd Author's Affiliation | Tohoku University (Tohoku) |
| 4th Author's Name | Yukie Hayashi |
| 4th Author's Affiliation | Tohoku University (Tohoku) |
| 5th Author's Name | Yuka Suzuki |
| 5th Author's Affiliation | Tohoku University (Tohoku) |
| 6th Author's Name | Hiromi Sato |
| 6th Author's Affiliation | Tohoku University (Tohoku) |
| 7th Author's Name | Yukiko Obara |
| 7th Author's Affiliation | Tohoku University (Tohoku) |
| 8th Author's Name | Ryo Nagumo |
| 8th Author's Affiliation | Tohoku University (Tohoku) |
| 9th Author's Name | Ryuji Miura |
| 9th Author's Affiliation | Tohoku University (Tohoku) |
| 10th Author's Name | Ai Suzuki |
| 10th Author's Affiliation | Tohoku University (Tohoku) |
| 11th Author's Name | Nozomu Hatakeyama |
| 11th Author's Affiliation | Tohoku University (Tohoku) |
| 12th Author's Name | Akira Endou |
| 12th Author's Affiliation | Tohoku University (Tohoku) |
| 13th Author's Name | Hiromitsu Takaba |
| 13th Author's Affiliation | Tohoku University (Tohoku) |
| 14th Author's Name | Momoji Kubo |
| 14th Author's Affiliation | Tohoku University (Tohoku) |
| 15th Author's Name | Akira Miyamoto |
| 15th Author's Affiliation | Tohoku University (Tohoku) |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2010-11-12 11:20:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2010-178 |
| Volume (vol) | vol.110 |
| Number (no) | no.274 |
| Page | pp.41-43 |
| #Pages | 3 |
| Date of Issue | 2010-11-04 (SDM) |
[Return to Top Page]