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Paper Abstract and Keywords
Presentation 2012-02-23 13:00
[Invited Talk] Ultrasonic measurements of electronic materials
Jun-ichi Kushibiki (Touhoku Univ.) US2011-108
Abstract (in Japanese) (See Japanese page) 
(in English) For over 40 years at Tohoku University, the author has conducted the research and development associated with ultrasonic metrology, especially acoustic microscopy and its applications, on the basis of his research background with a wide variety of knowledge, experience, and technologies on ultrasonics. He was an inventor of the line-focus-beam (LFB) acoustic microscope, and established a novel method of quantitative material characterization through the V(z) curve analysis, in the research field of acoustic microscopy, and completed the LFB ultrasonic material characterization (LFB-UMC) system. He also developed the ultrasonic microspectroscopy (UMS) technology comprising acoustic microscopy and VHF/UHF ultrasonic spectroscopy and its applications, with a measurement precision of 0.001% in velocity for surface acoustic waves and bulk (longitudinal and shear) waves. He verified its usefulness and effectiveness by resolving various kinds of scientific and industrial problems associated with single crystals such as LiNbO3, LiTaO3, ZnO, AlN, and α-quartz, and ultra-low-expansion SiO2 glasses, and by applying it to their epitaxial single and polycrystalline thin films. This paper will review the research background and some typical results.
Keyword (in Japanese) (See Japanese page) 
(in English) ultrasonic micro-spectroscopy / line-focus-beam acoustic microscopy / leaky surface-acoustic-wave and bulk-wave velocity measurements / zero-CTE temperature / fictive temperature / acoustical physical constants / piezoelectric single crystals / TiO2-SiO2 ULE glass  
Reference Info. IEICE Tech. Rep., vol. 111, no. 443, US2011-108, pp. 23-28, Feb. 2012.
Paper # US2011-108 
Date of Issue 2012-02-16 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2011-108

Conference Information
Committee US  
Conference Date 2012-02-23 - 2012-02-23 
Place (in Japanese) (See Japanese page) 
Place (in English) GE Healthcare Japan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Acoustic Imaging, General, etc 
Paper Information
Registration To US 
Conference Code 2012-02-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Ultrasonic measurements of electronic materials 
Sub Title (in English)  
Keyword(1) ultrasonic micro-spectroscopy  
Keyword(2) line-focus-beam acoustic microscopy  
Keyword(3) leaky surface-acoustic-wave and bulk-wave velocity measurements  
Keyword(4) zero-CTE temperature  
Keyword(5) fictive temperature  
Keyword(6) acoustical physical constants  
Keyword(7) piezoelectric single crystals  
Keyword(8) TiO2-SiO2 ULE glass  
1st Author's Name Jun-ichi Kushibiki  
1st Author's Affiliation Touhoku University (Touhoku Univ.)
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Speaker Author-1 
Date Time 2012-02-23 13:00:00 
Presentation Time 60 minutes 
Registration for US 
Paper # US2011-108 
Volume (vol) vol.111 
Number (no) no.443 
Page pp.23-28 
#Pages 6 
Date of Issue 2012-02-16 (US) 

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