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Paper Abstract and Keywords
Presentation 2012-09-24 14:45
Fabrication of polarity-inverted ZnO films using ion bombardment to the substrate during an RF magnetron sputtering
Ryo Ikoma (Doshisha Univ.), Takahiko Yanagitani (Nagoya Inst.Tech.), Shinji Takayanagi (Doshisha Univ.), Masashi Suzuki (Nagoya Inst.Tech.), Hiroyuki Odagawa (Kumamoto NCT), Mami Matsukawa (Doshisha Univ.) US2012-61
Abstract (in Japanese) (See Japanese page) 
(in English) ZnO have been used as SAW devices and high frequency transducer owing to its high electromechanical coupling. In general, ZnO films deposited by sputtering method have O-polar surface. On the other hand, it is known that AlN films deposited by sputtering have Al-polar surface. In case of AlN, we have reported that the O- negative ion bombardment induces unusual N-polar AlN film growth. We then considered that Zn- or O- polarization control could also be achieved by using ion bonbardment during RF magnetron sputtering. To investigate the contribution of positive and negative ion bombardment to O-polar ZnO films growth, two types of ZnO films were fabricated on Al film/silica glass substrates by changing RF power of 100 W or 200 W during RF magnetron sputtering. The amount of ion bombardment to the substrate surface was quantitatively measured using an energy analyzer with Q-mass. Polarization of the films was determined by piezoelectric response due to the compression stress applied to the specimen. As a result, we had succeed the fabracation of the unusual O-polar ZnO film under strong ion bonbardment condition. Control of Zn- or O-polar c-axis oriented ZnO films has a potential to realize new functional piezoelectric devices.
Keyword (in Japanese) (See Japanese page) 
(in English) Polarization control / ZnO film / Ion bombardment / RF magnetron sputtering / Thickness extensional mode / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 213, US2012-61, pp. 21-25, Sept. 2012.
Paper # US2012-61 
Date of Issue 2012-09-17 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2012-09-24 - 2012-09-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Tegata Campus, Akita Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) General 
Paper Information
Registration To US 
Conference Code 2012-09-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of polarity-inverted ZnO films using ion bombardment to the substrate during an RF magnetron sputtering 
Sub Title (in English)  
Keyword(1) Polarization control  
Keyword(2) ZnO film  
Keyword(3) Ion bombardment  
Keyword(4) RF magnetron sputtering  
Keyword(5) Thickness extensional mode  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Ryo Ikoma  
1st Author's Affiliation Doshisha University (Doshisha Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Nagoya Institute of Technology (Nagoya Inst.Tech.)
3rd Author's Name Shinji Takayanagi  
3rd Author's Affiliation Doshisha University (Doshisha Univ.)
4th Author's Name Masashi Suzuki  
4th Author's Affiliation Nagoya Institute of Technology (Nagoya Inst.Tech.)
5th Author's Name Hiroyuki Odagawa  
5th Author's Affiliation Kumamoto National College of Technology (Kumamoto NCT)
6th Author's Name Mami Matsukawa  
6th Author's Affiliation Doshisha University (Doshisha Univ.)
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Speaker Author-1 
Date Time 2012-09-24 14:45:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2012-61 
Volume (vol) vol.112 
Number (no) no.213 
Page pp.21-25 
#Pages 5 
Date of Issue 2012-09-17 (US) 

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