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Paper Abstract and Keywords
Presentation 2012-10-25 15:20
Chemical structures of compositional transition layer at SiO2/Si(100) interface
Tomoyuki Suwa, Akinobu Teramoto (Tohoku Univ.), Takayuki Muro, Toyohiko Kinoshita (JASRI), Shigetoshi Sugawa, Takeo Hattori, Tadahiro Ohmi (Tohoku Univ.) SDM2012-89
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 263, SDM2012-89, pp. 1-4, Oct. 2012.
Paper # SDM2012-89 
Date of Issue 2012-10-18 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2012-10-25 - 2012-10-26 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ. (Niche) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process science and new process technologies 
Paper Information
Registration To SDM 
Conference Code 2012-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Chemical structures of compositional transition layer at SiO2/Si(100) interface 
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1st Author's Name Tomoyuki Suwa  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Akinobu Teramoto  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Takayuki Muro  
3rd Author's Affiliation Japan Synchrotron Radiation Research Institute (JASRI)
4th Author's Name Toyohiko Kinoshita  
4th Author's Affiliation Japan Synchrotron Radiation Research Institute (JASRI)
5th Author's Name Shigetoshi Sugawa  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Takeo Hattori  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Tadahiro Ohmi  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2012-10-25 15:20:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2012-89 
Volume (vol) vol.112 
Number (no) no.263 
Page pp.1-4 
#Pages 4 
Date of Issue 2012-10-18 (SDM) 

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