Paper Abstract and Keywords |
Presentation |
2012-11-29 11:55
High growth rate AlN and AlGaN on large diameter Si substrate(6inch & 8inch) Hiroki Tokunaga, Akinori Ubukata, Yoshiki Yano, Yuya Yamaoka, Akira Yamaguchi, Toshiya Tabuchi (TNSC), Kou Matumoto (TNEMC) ED2012-69 CPM2012-126 LQE2012-97 Link to ES Tech. Rep. Archives: ED2012-69 CPM2012-126 LQE2012-97 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 112, no. 327, ED2012-69, pp. 17-20, Nov. 2012. |
Paper # |
ED2012-69 |
Date of Issue |
2012-11-22 (ED, CPM, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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ED2012-69 CPM2012-126 LQE2012-97 Link to ES Tech. Rep. Archives: ED2012-69 CPM2012-126 LQE2012-97 |
Conference Information |
Committee |
ED LQE CPM |
Conference Date |
2012-11-29 - 2012-11-30 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Osaka City University |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Nitride and Compound Semiconductor Devices |
Paper Information |
Registration To |
ED |
Conference Code |
2012-11-ED-LQE-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
High growth rate AlN and AlGaN on large diameter Si substrate(6inch & 8inch) |
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1st Author's Name |
Hiroki Tokunaga |
1st Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
2nd Author's Name |
Akinori Ubukata |
2nd Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
3rd Author's Name |
Yoshiki Yano |
3rd Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
4th Author's Name |
Yuya Yamaoka |
4th Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
5th Author's Name |
Akira Yamaguchi |
5th Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
6th Author's Name |
Toshiya Tabuchi |
6th Author's Affiliation |
Taiyo Nissan Corporation (TNSC) |
7th Author's Name |
Kou Matumoto |
7th Author's Affiliation |
Taiyo Nissan EMC Corporation (TNEMC) |
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Speaker |
Author-1 |
Date Time |
2012-11-29 11:55:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2012-69, CPM2012-126, LQE2012-97 |
Volume (vol) |
vol.112 |
Number (no) |
no.327(ED), no.328(CPM), no.329(LQE) |
Page |
pp.17-20 |
#Pages |
4 |
Date of Issue |
2012-11-22 (ED, CPM, LQE) |
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