IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2012-11-29 11:55
High growth rate AlN and AlGaN on large diameter Si substrate(6inch & 8inch)
Hiroki Tokunaga, Akinori Ubukata, Yoshiki Yano, Yuya Yamaoka, Akira Yamaguchi, Toshiya Tabuchi (TNSC), Kou Matumoto (TNEMC) ED2012-69 CPM2012-126 LQE2012-97 Link to ES Tech. Rep. Archives: ED2012-69 CPM2012-126 LQE2012-97
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 327, ED2012-69, pp. 17-20, Nov. 2012.
Paper # ED2012-69 
Date of Issue 2012-11-22 (ED, CPM, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2012-69 CPM2012-126 LQE2012-97 Link to ES Tech. Rep. Archives: ED2012-69 CPM2012-126 LQE2012-97

Conference Information
Committee ED LQE CPM  
Conference Date 2012-11-29 - 2012-11-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka City University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Nitride and Compound Semiconductor Devices 
Paper Information
Registration To ED 
Conference Code 2012-11-ED-LQE-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High growth rate AlN and AlGaN on large diameter Si substrate(6inch & 8inch) 
Sub Title (in English)  
Keyword(1)  
Keyword(2)  
Keyword(3)  
Keyword(4)  
Keyword(5)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Tokunaga  
1st Author's Affiliation Taiyo Nissan Corporation (TNSC)
2nd Author's Name Akinori Ubukata  
2nd Author's Affiliation Taiyo Nissan Corporation (TNSC)
3rd Author's Name Yoshiki Yano  
3rd Author's Affiliation Taiyo Nissan Corporation (TNSC)
4th Author's Name Yuya Yamaoka  
4th Author's Affiliation Taiyo Nissan Corporation (TNSC)
5th Author's Name Akira Yamaguchi  
5th Author's Affiliation Taiyo Nissan Corporation (TNSC)
6th Author's Name Toshiya Tabuchi  
6th Author's Affiliation Taiyo Nissan Corporation (TNSC)
7th Author's Name Kou Matumoto  
7th Author's Affiliation Taiyo Nissan EMC Corporation (TNEMC)
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker Author-1 
Date Time 2012-11-29 11:55:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2012-69, CPM2012-126, LQE2012-97 
Volume (vol) vol.112 
Number (no) no.327(ED), no.328(CPM), no.329(LQE) 
Page pp.17-20 
#Pages
Date of Issue 2012-11-22 (ED, CPM, LQE) 


[Return to Top Page]

[Return to IEICE Web Page]


The Institute of Electronics, Information and Communication Engineers (IEICE), Japan