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Paper Abstract and Keywords
Presentation 2012-11-30 11:50
Fabrication of moth-eye patterned sapphire substrate (MPSS) and its application to LEDs
Takayoshi Tsuchiya, Shinya Umeda, Mihoko Sowa (Meijo Univ.), Toshiyuki Kondo, Tsukasa Kitano, Midori Mori, Atsushi Suzuki, Koichi Naniwae, Hitoshi Sekine (ELSEED), Motoaki Iwaya, Tetsuya Takeuchi, Satoshi Kamiyama, Isamu Akasaki (Meijo Univ.) ED2012-82 CPM2012-139 LQE2012-110
Abstract (in Japanese) (See Japanese page) 
(in English) Fabrication processes of a moth-eye patterned sapphire substrate (MPSS), which can enhance a light extraction efficiency of nitride-based light emitting diodes (LEDs) have been examined.
Optimization of structural parameters of MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch 460nm, and a height of corns of 250, 300 and 350nm. Light extraction efficiency of blue-LEDs growth on a series of MPSS was enhanced 1.4 times as compared with the devices grown on a flat sapphire substrate, while there is no dependence of height of corns on LED performance.
Keyword (in Japanese) (See Japanese page) 
(in English) PSS / Moth-eye / UV-nanoimprinting technique / Dry etching / LEDs / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 329, LQE2012-110, pp. 75-80, Nov. 2012.
Paper # LQE2012-110 
Date of Issue 2012-11-22 (ED, CPM, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2012-82 CPM2012-139 LQE2012-110

Conference Information
Committee ED LQE CPM  
Conference Date 2012-11-29 - 2012-11-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka City University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Ｎｉｔｒide and Compound Semiconductor Devices 
Paper Information
Registration To LQE 
Conference Code 2012-11-ED-LQE-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of moth-eye patterned sapphire substrate (MPSS) and its application to LEDs 
Sub Title (in English)  
Keyword(1) PSS  
Keyword(2) Moth-eye  
Keyword(3) UV-nanoimprinting technique  
Keyword(4) Dry etching  
Keyword(5) LEDs  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Takayoshi Tsuchiya  
1st Author's Affiliation Meijo University (Meijo Univ.)
2nd Author's Name Shinya Umeda  
2nd Author's Affiliation Meijo University (Meijo Univ.)
3rd Author's Name Mihoko Sowa  
3rd Author's Affiliation Meijo University (Meijo Univ.)
4th Author's Name Toshiyuki Kondo  
4th Author's Affiliation ELSEED Corp. (ELSEED)
5th Author's Name Tsukasa Kitano  
5th Author's Affiliation ELSEED Corp. (ELSEED)
6th Author's Name Midori Mori  
6th Author's Affiliation ELSEED Corp. (ELSEED)
7th Author's Name Atsushi Suzuki  
7th Author's Affiliation ELSEED Corp. (ELSEED)
8th Author's Name Koichi Naniwae  
8th Author's Affiliation ELSEED Corp. (ELSEED)
9th Author's Name Hitoshi Sekine  
9th Author's Affiliation ELSEED Corp. (ELSEED)
10th Author's Name Motoaki Iwaya  
10th Author's Affiliation Meijo University (Meijo Univ.)
11th Author's Name Tetsuya Takeuchi  
11th Author's Affiliation Meijo University (Meijo Univ.)
12th Author's Name Satoshi Kamiyama  
12th Author's Affiliation Meijo University (Meijo Univ.)
13th Author's Name Isamu Akasaki  
13th Author's Affiliation Meijo University (Meijo Univ.)
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Speaker Author-1 
Date Time 2012-11-30 11:50:00 
Presentation Time 25 minutes 
Registration for LQE 
Paper # ED2012-82, CPM2012-139, LQE2012-110 
Volume (vol) vol.112 
Number (no) no.327(ED), no.328(CPM), no.329(LQE) 
Page pp.75-80 
#Pages 6 
Date of Issue 2012-11-22 (ED, CPM, LQE) 

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