| 講演抄録/キーワード |
| 講演名 |
2012-12-01 13:00
[招待講演]The Contact Resistance Performance of Gold Coated Carbon-Nanotube Surfaces under Low Current Switching. ○John W.McBride・Chamaporn Chianrabutra・Liudi Jiang・Suan Hui Pu(Univ. of Southampton) EMD2012-83 |
| 抄録 |
(和) |
Multi-Walled CNT (MWCNT) are synthesized on a silicon wafer and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a gold coated hemispherical surface to form an electrical contact. These switching contacts are tested under conditions typical of MEMS relay applications; 4 V, with a static contact force of 1 mN, at a low current between 20 50 mA. The evolution of contact resistance is considered in a newly developed test procedure. The contact resistance performance is then linked to a study of the contact changes in the surface. The contact surfaces have been shown to exhibit a transfer process over a large number of switching cycles. The continuous monitoring of contact resistance can be used for the identification of surface failure. The results show that for the surfaces presented the contact resistance remains stable for between 80 and 120 million switching cycles. Interestingly the number of bounces is related to the fine transfer failure mechanism. |
| (英) |
Multi-Walled CNT (MWCNT) are synthesized on a silicon wafer and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a gold coated hemispherical surface to form an electrical contact. These switching contacts are tested under conditions typical of MEMS relay applications; 4 V, with a static contact force of 1 mN, at a low current between 20 50 mA. The evolution of contact resistance is considered in a newly developed test procedure. The contact resistance performance is then linked to a study of the contact changes in the surface. The contact surfaces have been shown to exhibit a transfer process over a large number of switching cycles. The continuous monitoring of contact resistance can be used for the identification of surface failure. The results show that for the surfaces presented the contact resistance remains stable for between 80 and 120 million switching cycles. Interestingly the number of bounces is related to the fine transfer failure mechanism. |
| キーワード |
(和) |
Carbon nanotubes / contact surface / MEMS switching surface / fine transfer mechanism / contact resistance / / / |
| (英) |
Carbon nanotubes / contact surface / MEMS switching surface / fine transfer mechanism / contact resistance / / / |
| 文献情報 |
信学技報, vol. 112, no. 332, EMD2012-83, pp. 105-112, 2012年11月. |
| 資料番号 |
EMD2012-83 |
| 発行日 |
2012-11-23 (EMD) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
著作権に ついて |
技術研究報告に掲載された論文の著作権は電子情報通信学会に帰属します.(許諾番号:10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| PDFダウンロード |
EMD2012-83 |