| Conference Information |
| Committee |
SDM ED CPM |
| Conference Date |
2013-05-16 - 2013-05-17 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Shizuoka Univ. (Hamamatsu) Graduate School of Sci. and Technol. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Crystal Growth, Characterization, Device, etc (compound semiconductors, Si, SiGe, optical and electronic materials) |
| Paper Information |
| Registration To |
ED |
| Conference Code |
2013-05-SDM-ED-CPM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Sensitivity measurement and pressure mapping of ultrasonic transducer using PZT thin films on epitaxial γ-Al2O3/Si substrate |
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| 1st Author's Name |
Masato Nishimura |
| 1st Author's Affiliation |
Toyohashi University of Technology (Toyohashi Univ) |
| 2nd Author's Name |
Katsuya Ozaki |
| 2nd Author's Affiliation |
Toyohashi University of Technology (Toyohashi Univ) |
| 3rd Author's Name |
Daisuke Akai |
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Toyohashi University of Technology (Toyohashi Univ) |
| 4th Author's Name |
Makoto Ishida |
| 4th Author's Affiliation |
Toyohashi University of Technology (Toyohashi Univ) |
| 5th Author's Name |
Nagaya Okada |
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Honda Electronics Co.,Ltd. (Honda Electronics) |
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| Speaker |
Author-1 |
| Date Time |
2013-05-16 15:20:00 |
| Presentation Time |
25 minutes |
| Registration for |
ED |
| Paper # |
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| Volume (vol) |
vol.113 |
| Number (no) |
no.39(ED), no.40(CPM), no.41(SDM) |
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