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| Presentation | 2013-05-17 16:35 GHz Response of MSM InGaAs Photodetector on Si Substrate by BCB Bonding Kazuaki Maekita, Takeo Maruyama, Koichi Iiyama (Kanazawa Univ.)  LQE2013-15 Link to ES Tech. Rep. Archives: LQE2013-15 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | To realize an optical interconnect, it is necessary to integrate light sources and photodetectors on the silicon platform. We fabricated an InGaAs metal-semiconductor-metal (MSM) photodetector bonded on Si substrate by Benzocyclobutene (BCB) bonding method. Fabricated InGaAs MSM photodetector was characterized at the wavelength of 1.55 um. At the bias voltage of -6 V, the dark current of 29 nA was obtained. At the bias voltage of 15 V, the responsivity and bandwidth was 0.035 A/W and 3GHz, respectively. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | BCB bonding / InGaAs / MSM photodetector / Silicon photonics / High frequency response / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 113, no. 49, LQE2013-15, pp. 67-70, May 2013. | |
| Paper # | LQE2013-15 | |
| Date of Issue | 2013-05-10 (LQE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | LQE2013-15 Link to ES Tech. Rep. Archives: LQE2013-15 |
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| Conference Information | |
| Committee | LQE LSJ |
| Conference Date | 2013-05-17 - 2013-05-17 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | LQE |
| Conference Code | 2013-05-LQE-LSJ |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | GHz Response of MSM InGaAs Photodetector on Si Substrate by BCB Bonding |
| Sub Title (in English) | |
| Keyword(1) | BCB bonding |
| Keyword(2) | InGaAs |
| Keyword(3) | MSM photodetector |
| Keyword(4) | Silicon photonics |
| Keyword(5) | High frequency response |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kazuaki Maekita |
| 1st Author's Affiliation | Kanazawa University (Kanazawa Univ.) |
| 2nd Author's Name | Takeo Maruyama |
| 2nd Author's Affiliation | Kanazawa University (Kanazawa Univ.) |
| 3rd Author's Name | Koichi Iiyama |
| 3rd Author's Affiliation | Kanazawa University (Kanazawa Univ.) |
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| Speaker | Author-1 |
| Date Time | 2013-05-17 16:35:00 |
| Presentation Time | 25 minutes |
| Registration for | LQE |
| Paper # | LQE2013-15 |
| Volume (vol) | vol.113 |
| Number (no) | no.49 |
| Page | pp.67-70 |
| #Pages | 4 |
| Date of Issue | 2013-05-10 (LQE) |
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