Paper Abstract and Keywords |
Presentation |
2013-11-14 14:15
The effect of incorporated elements in nitrogen vacancies on electron trap level in silicon nitride Kenichiro Sonoda, Eiji Tsukuda, Motoaki Tanizawa, Kiyoshi Ishikawa, Yasuo Yamaguchi (Renesas Electronics) SDM2013-103 Link to ES Tech. Rep. Archives: SDM2013-103 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 113, no. 296, SDM2013-103, pp. 21-26, Nov. 2013. |
Paper # |
SDM2013-103 |
Date of Issue |
2013-11-07 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SDM2013-103 Link to ES Tech. Rep. Archives: SDM2013-103 |
Conference Information |
Committee |
SDM |
Conference Date |
2013-11-14 - 2013-11-15 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Process, Device, Circuit Simulations, etc. |
Paper Information |
Registration To |
SDM |
Conference Code |
2013-11-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
The effect of incorporated elements in nitrogen vacancies on electron trap level in silicon nitride |
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1st Author's Name |
Kenichiro Sonoda |
1st Author's Affiliation |
Renesas Electronics Corporation (Renesas Electronics) |
2nd Author's Name |
Eiji Tsukuda |
2nd Author's Affiliation |
Renesas Electronics Corporation (Renesas Electronics) |
3rd Author's Name |
Motoaki Tanizawa |
3rd Author's Affiliation |
Renesas Electronics Corporation (Renesas Electronics) |
4th Author's Name |
Kiyoshi Ishikawa |
4th Author's Affiliation |
Renesas Electronics Corporation (Renesas Electronics) |
5th Author's Name |
Yasuo Yamaguchi |
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Renesas Electronics Corporation (Renesas Electronics) |
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Speaker |
Author-1 |
Date Time |
2013-11-14 14:15:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
SDM2013-103 |
Volume (vol) |
vol.113 |
Number (no) |
no.296 |
Page |
pp.21-26 |
#Pages |
6 |
Date of Issue |
2013-11-07 (SDM) |