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Paper Abstract and Keywords
Presentation 2013-11-14 14:15
The effect of incorporated elements in nitrogen vacancies on electron trap level in silicon nitride
Kenichiro Sonoda, Eiji Tsukuda, Motoaki Tanizawa, Kiyoshi Ishikawa, Yasuo Yamaguchi (Renesas Electronics) SDM2013-103 Link to ES Tech. Rep. Archives: SDM2013-103
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 113, no. 296, SDM2013-103, pp. 21-26, Nov. 2013.
Paper # SDM2013-103 
Date of Issue 2013-11-07 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2013-103 Link to ES Tech. Rep. Archives: SDM2013-103

Conference Information
Committee SDM  
Conference Date 2013-11-14 - 2013-11-15 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process, Device, Circuit Simulations, etc. 
Paper Information
Registration To SDM 
Conference Code 2013-11-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The effect of incorporated elements in nitrogen vacancies on electron trap level in silicon nitride 
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1st Author's Name Kenichiro Sonoda  
1st Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
2nd Author's Name Eiji Tsukuda  
2nd Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
3rd Author's Name Motoaki Tanizawa  
3rd Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
4th Author's Name Kiyoshi Ishikawa  
4th Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
5th Author's Name Yasuo Yamaguchi  
5th Author's Affiliation Renesas Electronics Corporation (Renesas Electronics)
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Date Time 2013-11-14 14:15:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2013-103 
Volume (vol) vol.113 
Number (no) no.296 
Page pp.21-26 
#Pages
Date of Issue 2013-11-07 (SDM) 


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