Paper Abstract and Keywords |
Presentation |
2013-12-12 16:15
Deposition of Co/Pt film with perpendicular magnetic anisotropy by layer stacking sputtering Taruho Tsuchiya, Naoki Honda (Tohoku Inst. of Tech.) MR2013-30 Link to ES Tech. Rep. Archives: MR2013-30 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Low temperature preparation of Co/Pt stacked film with high magnetic anisotropy was studied using atomic layer stacking collimated sputter-deposition. Although a trace super lattice line corresponding to the L11 ordered phase was observed for films with higher Ar pressure and higher substrate temperature deposition in the X-ray diffraction, L11 ordering was not supposed to be obtained. Magnetic properties, however, exhibited a high saturation magnetization of about 1000 emu/cm3 and a large perpendicular magnetic anisotropy. Low Ar pressure sputtering at 0.8 Pa exhibited little difference in magnetic properties between films deposited at different substrate temperatures. On the contrary, the films deposited at a high Ar pressure of 9.6 Pa exhibited a high coercivity of 5 kOe for RT deposition, but the coercivity decreased and the anisotropy field was increased to be estimated as high as about 20 kOe, which indicated a high perpendicular anisotropy of 1×107 erg/cm3. The cause of the anisotropy was suggested to be come from micro ordering. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Layer stacking sputter-deposition / Collimated sputtering / Ordered CoPt film / Perpendicular magnetic anisotropy / Low temperature deposition / / / |
Reference Info. |
IEICE Tech. Rep., vol. 113, Dec. 2013. |
Paper # |
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Date of Issue |
2013-12-05 (MR) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
MR2013-30 Link to ES Tech. Rep. Archives: MR2013-30 |
Conference Information |
Committee |
MRIS ITE-MMS |
Conference Date |
2013-12-12 - 2013-12-13 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Ehime Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Signal Processing, etc. |
Paper Information |
Registration To |
MRIS |
Conference Code |
2013-12-MR-MMS |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Deposition of Co/Pt film with perpendicular magnetic anisotropy by layer stacking sputtering |
Sub Title (in English) |
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Keyword(1) |
Layer stacking sputter-deposition |
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Collimated sputtering |
Keyword(3) |
Ordered CoPt film |
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Perpendicular magnetic anisotropy |
Keyword(5) |
Low temperature deposition |
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1st Author's Name |
Taruho Tsuchiya |
1st Author's Affiliation |
Tohoku Institute of Technology (Tohoku Inst. of Tech.) |
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Naoki Honda |
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Tohoku Institute of Technology (Tohoku Inst. of Tech.) |
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Speaker |
Author-1 |
Date Time |
2013-12-12 16:15:00 |
Presentation Time |
30 minutes |
Registration for |
MRIS |
Paper # |
MR2013-30 |
Volume (vol) |
vol.113 |
Number (no) |
no.345 |
Page |
pp.33-38 |
#Pages |
6 |
Date of Issue |
2013-12-05 (MR) |