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Paper Abstract and Keywords
Presentation 2014-04-10 15:00
Influence of electron irradiation on Au-induced crystallization for amorphous Ge/SiO2-substrate
Kenta Moto, Shin Sakiyama, Takatsugu Sakai, Kazutoshi Nakashima, Hayato Okamoto, Kenichiro Takakura, Isao Tsunoda (KNCT) SDM2014-5 OME2014-5
Abstract (in Japanese) (See Japanese page) 
(in English) Au-induced crystallization for amorphous Ge（a-Ge）thin film on insulator is investigated as low-temperature crystallization method. However，low-temperature crystallization is required long annealing time（～a few hours）in this method. To reduce the annealing time for crystallization，we have examined the electron irradiation effect of Au-induced crystallization for a-Ge/SiO2. As a result，the annealing time for crystallization is reduced to 1/2 by electron irradiation. In addition，the lateral crystallization region has high crystalline quality. These results suggest that Au-induced crystallization for a-Ge/SiO2 is enhanced by electron irradiation.
Keyword (in Japanese) (See Japanese page) 
(in English) Metal induced crystallization / Low temperature formation / Germanium / Electron irradiation / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 1, SDM2014-5, pp. 21-25, April 2014.
Paper # SDM2014-5 
Date of Issue 2014-04-03 (SDM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2014-5 OME2014-5

Conference Information
Committee SDM OME  
Conference Date 2014-04-10 - 2014-04-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa-Ken-Seinen-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Advanced Thin-Film Devices (Si, Compound, Organic) and Related Topics 
Paper Information
Registration To SDM 
Conference Code 2014-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Influence of electron irradiation on Au-induced crystallization for amorphous Ge/SiO2-substrate 
Sub Title (in English)  
Keyword(1) Metal induced crystallization  
Keyword(2) Low temperature formation  
Keyword(3) Germanium  
Keyword(4) Electron irradiation  
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Keyword(6)  
Keyword(7)  
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1st Author's Name Kenta Moto  
1st Author's Affiliation Kumamoto National College of Technology (KNCT)
2nd Author's Name Shin Sakiyama  
2nd Author's Affiliation Kumamoto National College of Technology (KNCT)
3rd Author's Name Takatsugu Sakai  
3rd Author's Affiliation Kumamoto National College of Technology (KNCT)
4th Author's Name Kazutoshi Nakashima  
4th Author's Affiliation Kumamoto National College of Technology (KNCT)
5th Author's Name Hayato Okamoto  
5th Author's Affiliation Kumamoto National College of Technology (KNCT)
6th Author's Name Kenichiro Takakura  
6th Author's Affiliation Kumamoto National College of Technology (KNCT)
7th Author's Name Isao Tsunoda  
7th Author's Affiliation Kumamoto National College of Technology (KNCT)
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Speaker Author-1 
Date Time 2014-04-10 15:00:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2014-5, OME2014-5 
Volume (vol) vol.114 
Number (no) no.1(SDM), no.2(OME) 
Page pp.21-25 
#Pages 5 
Date of Issue 2014-04-03 (SDM, OME) 

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