| Paper Abstract and Keywords |
| Presentation |
2014-07-17 10:00
Sensitivity Enhancement of SOI Photodiode by Metal Diffraction Grating Hiroaki Satoh, Shohei Iwata, Atsushi Ono, Hiroshi Inokawa (Shizuoka Univ.) MW2014-61 OPE2014-30 EST2014-22 MWP2014-19 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The integrated circuits based on SOI (silicon-on-insulator) technology have the advantages of operation speed, power consumption, circuit density, etc., compared with those of bulk silicon. However, the sensitivity of SOI photodetectors is usually not high due to the small thickness. To enhance the sensitivity, a new type of SOI photodiode with line-and-space metal grating has been proposed. In this report, it is shown that the approximately one-order magnitude enhancement for specific wavelength and polarization can be achieved by applying the line-and-space metal grating to thin SOI photodiode.
Keyword SOI photodiode, metal diffraction grating, wavelength selectivity, polarization dependence. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
SOI photodiode / metal diffraction grating / wavelength selectivity / polarization dependence / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 114, no. 142, OPE2014-30, pp. 75-80, July 2014. |
| Paper # |
OPE2014-30 |
| Date of Issue |
2014-07-10 (MW, OPE, EST, MWP) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
MW2014-61 OPE2014-30 EST2014-22 MWP2014-19 |
| Conference Information |
| Committee |
MW OPE EMT MWP EST IEE-EMT |
| Conference Date |
2014-07-17 - 2014-07-18 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Muroran Inst. of Tech. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Light wave & Electromagnetic Wave Workshop |
| Paper Information |
| Registration To |
OPE |
| Conference Code |
2014-07-MW-OPE-EMT-MWP-EST-EMT |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Sensitivity Enhancement of SOI Photodiode by Metal Diffraction Grating |
| Sub Title (in English) |
|
| Keyword(1) |
SOI photodiode |
| Keyword(2) |
metal diffraction grating |
| Keyword(3) |
wavelength selectivity |
| Keyword(4) |
polarization dependence |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Hiroaki Satoh |
| 1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name |
Shohei Iwata |
| 2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name |
Atsushi Ono |
| 3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name |
Hiroshi Inokawa |
| 4th Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2014-07-17 10:00:00 |
| Presentation Time |
25 minutes |
| Registration for |
OPE |
| Paper # |
MW2014-61, OPE2014-30, EST2014-22, MWP2014-19 |
| Volume (vol) |
vol.114 |
| Number (no) |
no.141(MW), no.142(OPE), no.143(EST), no.144(MWP) |
| Page |
pp.75-80 |
| #Pages |
6 |
| Date of Issue |
2014-07-10 (MW, OPE, EST, MWP) |