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Paper Abstract and Keywords
Presentation 2014-11-06 10:55
Three-dimensional calculation of ion implantation to SiC substrate
Minoru Okamoto, Mamoru Shimizu, Yasuyuki Ohkura, Ken Yamaguchi, Hideaki Koike (AdvanceSoft) SDM2014-98
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) Power Device / TCAD / 3D calculation / Ion implantation / 4H-SiC / 6H-SiC / Parallel calculation /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 291, SDM2014-98, pp. 13-18, Nov. 2014.
Paper # SDM2014-98 
Date of Issue 2014-10-30 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2014-98

Conference Information
Committee SDM  
Conference Date 2014-11-06 - 2014-11-07 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process, Device, Circuit Simulation, etc. 
Paper Information
Registration To SDM 
Conference Code 2014-11-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Three-dimensional calculation of ion implantation to SiC substrate 
Sub Title (in English)  
Keyword(1) Power Device  
Keyword(2) TCAD  
Keyword(3) 3D calculation  
Keyword(4) Ion implantation  
Keyword(5) 4H-SiC  
Keyword(6) 6H-SiC  
Keyword(7) Parallel calculation  
Keyword(8)  
1st Author's Name Minoru Okamoto  
1st Author's Affiliation AdvanceSoft Corporation (AdvanceSoft)
2nd Author's Name Mamoru Shimizu  
2nd Author's Affiliation AdvanceSoft Corporation (AdvanceSoft)
3rd Author's Name Yasuyuki Ohkura  
3rd Author's Affiliation AdvanceSoft Corporation (AdvanceSoft)
4th Author's Name Ken Yamaguchi  
4th Author's Affiliation AdvanceSoft Corporation (AdvanceSoft)
5th Author's Name Hideaki Koike  
5th Author's Affiliation AdvanceSoft Corporation (AdvanceSoft)
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Speaker Author-1 
Date Time 2014-11-06 10:55:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2014-98 
Volume (vol) vol.114 
Number (no) no.291 
Page pp.13-18 
#Pages 6 
Date of Issue 2014-10-30 (SDM) 

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