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Paper Abstract and Keywords
Presentation 2015-01-27 14:00
[Invited Talk] High-precision Wafer-level Cu-Cu Bonding for 3DICs
Masashi Okada, Isao Sugaya, Hajime Mitsuishi, Hidehiro Maeda, Shigeto Izumi, Hosei Nakahira, Kazuya Okamoto (Nikon) SDM2014-140
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 421, SDM2014-140, pp. 21-24, Jan. 2015.
Paper # SDM2014-140 
Date of Issue 2015-01-20 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2015-01-27 - 2015-01-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2015-01-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High-precision Wafer-level Cu-Cu Bonding for 3DICs 
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1st Author's Name Masashi Okada  
1st Author's Affiliation Nikon Corporation (Nikon)
2nd Author's Name Isao Sugaya  
2nd Author's Affiliation Nikon Corporation (Nikon)
3rd Author's Name Hajime Mitsuishi  
3rd Author's Affiliation Nikon Corporation (Nikon)
4th Author's Name Hidehiro Maeda  
4th Author's Affiliation Nikon Corporation (Nikon)
5th Author's Name Shigeto Izumi  
5th Author's Affiliation Nikon Corporation (Nikon)
6th Author's Name Hosei Nakahira  
6th Author's Affiliation Nikon Corporation (Nikon)
7th Author's Name Kazuya Okamoto  
7th Author's Affiliation Nikon Corporation (Nikon)
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Speaker Author-1 
Date Time 2015-01-27 14:00:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2014-140 
Volume (vol) vol.114 
Number (no) no.421 
Page pp.21-24 
#Pages 4 
Date of Issue 2015-01-20 (SDM) 

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