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| Presentation | 2015-05-14 10:05 NP-completeness of Routing Problem with Bend Constraint Toshiyuki Hongo, Atsushi Takahashi (Tokyo Tech)  VLD2015-3 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Self-Aligned Quadruple Patterning (SAQP) in which side-wall process is repeated twice is an important manufacturing technique to realize tiny routing pattern in next generation lithography, however, every routing pattern is not realized. In order to obtain SAQP feasible routing patterns, a routing pattern generation method in which a special 3-color grid is used was proposed. In the routing pattern generation method, routing is classified into three according to the manufacturing process of SAQP. Among them, routing corresponding to the last manufacturing process neither allow to branch off nor to bend at several grids. Therefore, an algorithm that obtains a path between two vertices that satisfies bend constraint is required to obtain a routing that corresponds to the last manufacturing process. In this paper, the problem deciding whether there exists a path that satisfies the bend constraint is proved to be NP-complete in general. |
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| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Self-Aligned Quadruple Patterning / Bend Constraint / Routing Problem / NP-complete / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 21, VLD2015-3, pp. 13-18, May 2015. | |
| Paper # | VLD2015-3 | |
| Date of Issue | 2015-05-07 (VLD) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | VLD2015-3 |
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| Conference Information | |
| Committee | VLD IPSJ-SLDM |
| Conference Date | 2015-05-14 - 2015-05-14 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kitakyushu International Conference Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | System Design, etc. |
| Paper Information | |
| Registration To | VLD |
| Conference Code | 2015-05-VLD-SLDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | NP-completeness of Routing Problem with Bend Constraint |
| Sub Title (in English) | |
| Keyword(1) | Self-Aligned Quadruple Patterning |
| Keyword(2) | Bend Constraint |
| Keyword(3) | Routing Problem |
| Keyword(4) | NP-complete |
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| 1st Author's Name | Toshiyuki Hongo |
| 1st Author's Affiliation | Toyko Institute of technology (Tokyo Tech) |
| 2nd Author's Name | Atsushi Takahashi |
| 2nd Author's Affiliation | Toyko Institute of technology (Tokyo Tech) |
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| Speaker | Author-1 |
| Date Time | 2015-05-14 10:05:00 |
| Presentation Time | 25 minutes |
| Registration for | VLD |
| Paper # | VLD2015-3 |
| Volume (vol) | vol.115 |
| Number (no) | no.21 |
| Page | pp.13-18 |
| #Pages | 6 |
| Date of Issue | 2015-05-07 (VLD) |
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