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Paper Abstract and Keywords
Presentation 2015-05-22 11:00
Development of high-sensitive SOI photodiode by local surface plasmon scattering
Atsushi Ono (Shizuoka Univ.), Yasushi Enomoto, Yasufumi Matsumura (NSCC), Hiroaki Satoh, Hiroshi Inokawa (Shizuoka Univ.) LQE2015-12
Abstract (in Japanese) (See Japanese page) 
(in English) We demonstrated the quantum efficiency (QE) of silicon-oninsulator (SOI) photodiode was enhanced in visible wavelength region by using gold (Au) nanoparticles. The photons plasmonically scattered by Au nanoparticles couples with the waveguide mode in SOI, and are absorbed efficiently. Optimum size and density of Au nanoparticles have been investigated by 3-D FDTD simulations for sensitivity improvement. The highest enhancement factor of the absorption efficiency in 100-nm-thick SOI is obtained by periodically attaching Au nanoparticles of about 140 nm in diameter and 1.7 × 109 particles/cm2 in density. Two-fold enhancement in QE was experimentally achieved in visible by the SOI photodiode with randomly arranged Au nanoparticles of the size and density close to the optimized values.
Keyword (in Japanese) (See Japanese page) 
(in English) Photodiode / Surface plasmon / Silicon / Waveguide / Gold Nanoparticle / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 46, LQE2015-12, pp. 59-62, May 2015.
Paper # LQE2015-12 
Date of Issue 2015-05-14 (LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF LQE2015-12

Conference Information
Committee LQE LSJ  
Conference Date 2015-05-21 - 2015-05-22 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To LQE 
Conference Code 2015-05-LQE-LSJ 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of high-sensitive SOI photodiode by local surface plasmon scattering 
Sub Title (in English)  
Keyword(1) Photodiode  
Keyword(2) Surface plasmon  
Keyword(3) Silicon  
Keyword(4) Waveguide  
Keyword(5) Gold Nanoparticle  
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Keyword(7)  
Keyword(8)  
1st Author's Name Atsushi Ono  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Yasushi Enomoto  
2nd Author's Affiliation Nippon Steel & Sumikin Chemical Co. Ltd. (NSCC)
3rd Author's Name Yasufumi Matsumura  
3rd Author's Affiliation Nippon Steel & Sumikin Chemical Co. Ltd. (NSCC)
4th Author's Name Hiroaki Satoh  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Hiroshi Inokawa  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2015-05-22 11:00:00 
Presentation Time 25 minutes 
Registration for LQE 
Paper # LQE2015-12 
Volume (vol) vol.115 
Number (no) no.46 
Page pp.59-62 
#Pages 4 
Date of Issue 2015-05-14 (LQE) 

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