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| Presentation | 2015-09-03 15:20 Growth of c-axis parallel oriented ZnO film by RF magnetron sputtering at low gas pressure and its application in SAW and Lamb wave devices Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.), Jean-Claude Gerbedoen, Abdelkrim Talbi (IEMN), Mami Matsukawa (Doshisha Univ.), Philippe Pernod (IEMN)  US2015-50 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | ZnO piezoelectric films are widely used for acoustic wave devices. In most cases the (0001) oriented ZnO films were used. On the other hand, c-axis parallel oriented ZnO films have unique anisotropy of elastic properties enabling to generate acoustic waves with high electromechanical coupling coefficient K2. We demonstrated c-axis parallel oriented ZnO film growth by RF magnetron sputtering at low gas pressure. In theoretical analyses, values of K2, up to 3.8% for sezawa mode SAW and up to 10.5% for the first symmetrical Lamb wave mode, can be achieved with this film. Then, we fabricated SAW and Lamb wave devices, and measure the insertion loss characteristics. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ZnO film / c-Axis parallel oriented film / Sputtering method / Negative ion bombardment / SAW / Lamb wave / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 207, US2015-50, pp. 25-30, Sept. 2015. | |
| Paper # | US2015-50 | |
| Date of Issue | 2015-08-27 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2015-50 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2015-09-03 - 2015-09-04 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2015-09-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of c-axis parallel oriented ZnO film by RF magnetron sputtering at low gas pressure and its application in SAW and Lamb wave devices |
| Sub Title (in English) | |
| Keyword(1) | ZnO film |
| Keyword(2) | c-Axis parallel oriented film |
| Keyword(3) | Sputtering method |
| Keyword(4) | Negative ion bombardment |
| Keyword(5) | SAW |
| Keyword(6) | Lamb wave |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shinji Takayanagi |
| 1st Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
| 3rd Author's Name | Jean-Claude Gerbedoen |
| 3rd Author's Affiliation | Institute of Electronics, Microelectronics and Nanotechnology (IEMN) |
| 4th Author's Name | Abdelkrim Talbi |
| 4th Author's Affiliation | Institute of Electronics, Microelectronics and Nanotechnology (IEMN) |
| 5th Author's Name | Mami Matsukawa |
| 5th Author's Affiliation | Doshisha University (Doshisha Univ.) |
| 6th Author's Name | Philippe Pernod |
| 6th Author's Affiliation | Institute of Electronics, Microelectronics and Nanotechnology (IEMN) |
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| Speaker | Author-1 |
| Date Time | 2015-09-03 15:20:00 |
| Presentation Time | 30 minutes |
| Registration for | US |
| Paper # | US2015-50 |
| Volume (vol) | vol.115 |
| Number (no) | no.207 |
| Page | pp.25-30 |
| #Pages | 6 |
| Date of Issue | 2015-08-27 (US) |
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