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Paper Abstract and Keywords
Presentation 2015-10-06 09:30
Polygon Fracture Method Considering Maximum Shot Size for Variable Shaped-Beam Mask Writing
Mitsuru Hasegawa, Kunihiro Fujiyoshi (TUAT) CAS2015-34 NLP2015-95
Abstract (in Japanese) (See Japanese page) 
(in English) Since variable shaped-beam mask writing machines for LSI mask production can expose a rectangle shaped-beam, we need to partition rectilinear polygons in layout into a set of rectangles of the minimum number with considering size limit. For this problem, Kahng proposed an ILP method and a heuristic method. However, the former needs super-polynomial time and the latter may not obtain the optimum solution. In this paper, we propose a new fracturing method for convex rectilinear polygons using dynamic programming, which cut each polygon by slicing-lines through concave vertices firstly. The proposed method can solve the problem in polynomial time though it uses $O(n^4)$ memories in the worst case. Computer experiments confirm the space and time complexity of the method.
Keyword (in Japanese) (See Japanese page) 
(in English) Polygon Fracturing / EB writing / mask data / Dynamic Programming / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 239, CAS2015-34, pp. 69-74, Oct. 2015.
Paper # CAS2015-34 
Date of Issue 2015-09-28 (CAS, NLP) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee NLP CAS  
Conference Date 2015-10-05 - 2015-10-06 
Place (in Japanese) (See Japanese page) 
Place (in English) Aster Plaza 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CAS 
Conference Code 2015-10-NLP-CAS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Polygon Fracture Method Considering Maximum Shot Size for Variable Shaped-Beam Mask Writing 
Sub Title (in English)  
Keyword(1) Polygon Fracturing  
Keyword(2) EB writing  
Keyword(3) mask data  
Keyword(4) Dynamic Programming  
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1st Author's Name Mitsuru Hasegawa  
1st Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
2nd Author's Name Kunihiro Fujiyoshi  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
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Speaker Author-1 
Date Time 2015-10-06 09:30:00 
Presentation Time 25 minutes 
Registration for CAS 
Paper # CAS2015-34, NLP2015-95 
Volume (vol) vol.115 
Number (no) no.239(CAS), no.240(NLP) 
Page pp.69-74 
#Pages 6 
Date of Issue 2015-09-28 (CAS, NLP) 

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