Paper Abstract and Keywords |
Presentation |
2015-12-02 17:10
Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning Takeshi Ihara, Atsushi Takahashi (Tokyo Tech) VLD2015-53 DC2015-49 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14 nm technology node.
Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently.
Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid.
The routing pattern of SAQP on the grid consists of three types of routing.
Among them, third type has turn prohibition constraint on the grid.
Typical routing algorithms often fail to find a valid routing for third type.
In this paper, SAQP compliant two dimensional routing patterns are found on the grid by finding an optimal valid tertiary pattern effectively.
Experiments show that SAQP compliant routing patterns are found efficiently. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
SAQP / Routing Algorithm / Turn Probition Constraint / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 115, no. 338, VLD2015-53, pp. 93-98, Dec. 2015. |
Paper # |
VLD2015-53 |
Date of Issue |
2015-11-24 (VLD, DC) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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VLD2015-53 DC2015-49 |
Conference Information |
Committee |
VLD DC IPSJ-SLDM CPSY RECONF ICD CPM |
Conference Date |
2015-12-01 - 2015-12-03 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Nagasaki Kinro Fukushi Kaikan |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Design Gaia 2015 -New Field of VLSI Design- |
Paper Information |
Registration To |
VLD |
Conference Code |
2015-12-VLD-DC-SLDM-CPSY-RECONF-ICD-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning |
Sub Title (in English) |
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SAQP |
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Routing Algorithm |
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Turn Probition Constraint |
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1st Author's Name |
Takeshi Ihara |
1st Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech) |
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Atsushi Takahashi |
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Tokyo Institute of Technology (Tokyo Tech) |
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Speaker |
Author-1 |
Date Time |
2015-12-02 17:10:00 |
Presentation Time |
25 minutes |
Registration for |
VLD |
Paper # |
VLD2015-53, DC2015-49 |
Volume (vol) |
vol.115 |
Number (no) |
no.338(VLD), no.339(DC) |
Page |
pp.93-98 |
#Pages |
6 |
Date of Issue |
2015-11-24 (VLD, DC) |
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