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| Presentation | 2015-12-04 15:55 The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds Daiki Nakata, Noriyuki Kushiro (Kyutech)  AI2015-23 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In Semiconductor manufacturing factory, Semiconductor manufacturing equipment is always operated in the long term to improve efficiency of manufacturing and stops manufacturing line. Operating of equipment in the long term causes wearing error for the parts of equipment correctly. To avoid this risk, in the factory, they maintain the equipment. However, it is difficult to predict when the equipment will break down and the timing of maintenance is not optimal. In this paper, we use the operating sounds as the factor of diagnosis because operation sounds can catch the sign of error and can be acquired simply as data. We develop the systems to predict error without stopping the equipment by test data and the data of the fields. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Error / Predict / Diagnosis / Semiconductor Manufacturing Equipment / Vacuum Pump / Operation Sounds / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 337, AI2015-23, pp. 61-66, Dec. 2015. | |
| Paper # | AI2015-23 | |
| Date of Issue | 2015-11-27 (AI) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | AI2015-23 |
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| Conference Information | |
| Committee | AI |
| Conference Date | 2015-12-04 - 2015-12-04 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kyutech-Salite |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | AI |
| Conference Code | 2015-12-AI |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds |
| Sub Title (in English) | |
| Keyword(1) | Error |
| Keyword(2) | Predict |
| Keyword(3) | Diagnosis |
| Keyword(4) | Semiconductor Manufacturing Equipment |
| Keyword(5) | Vacuum Pump |
| Keyword(6) | Operation Sounds |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Daiki Nakata |
| 1st Author's Affiliation | Kyushu Institute of technlogy (Kyutech) |
| 2nd Author's Name | Noriyuki Kushiro |
| 2nd Author's Affiliation | Kyushu Institute of technlogy (Kyutech) |
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| Speaker | Author-1 |
| Date Time | 2015-12-04 15:55:00 |
| Presentation Time | 20 minutes |
| Registration for | AI |
| Paper # | AI2015-23 |
| Volume (vol) | vol.115 |
| Number (no) | no.337 |
| Page | pp.61-66 |
| #Pages | 6 |
| Date of Issue | 2015-11-27 (AI) |
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