Information: Join today and make your research activities more affordable! Technical workshop participation fees and annual registration fees are available at member rates.
Notice: [Important] Announcement of Changes to Registration Fee Payment and Manuscript Upload Procedures for IEICE Technical Meetings
IEICE Technical Committee Submission System
Conference Paper's Information		 Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2015-12-04 15:55
The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds
Daiki Nakata, Noriyuki Kushiro (Kyutech) AI2015-23
Abstract (in Japanese) (See Japanese page) 
(in English) In Semiconductor manufacturing factory, Semiconductor manufacturing equipment is always operated in the long term to improve efficiency of manufacturing and stops manufacturing line. Operating of equipment in the long term causes wearing error for the parts of equipment correctly. To avoid this risk, in the factory, they maintain the equipment. However, it is difficult to predict when the equipment will break down and the timing of maintenance is not optimal. In this paper, we use the operating sounds as the factor of diagnosis because operation sounds can catch the sign of error and can be acquired simply as data. We develop the systems to predict error without stopping the equipment by test data and the data of the fields.
Keyword (in Japanese) (See Japanese page) 
(in English) Error / Predict / Diagnosis / Semiconductor Manufacturing Equipment / Vacuum Pump / Operation Sounds / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 337, AI2015-23, pp. 61-66, Dec. 2015.
Paper # AI2015-23 
Date of Issue 2015-11-27 (AI) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF AI2015-23

Conference Information
Committee AI  
Conference Date 2015-12-04 - 2015-12-04 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyutech-Salite 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To AI 
Conference Code 2015-12-AI 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds 
Sub Title (in English)  
Keyword(1) Error  
Keyword(2) Predict  
Keyword(3) Diagnosis  
Keyword(4) Semiconductor Manufacturing Equipment  
Keyword(5) Vacuum Pump  
Keyword(6) Operation Sounds  
Keyword(7)  
Keyword(8)  
1st Author's Name Daiki Nakata  
1st Author's Affiliation Kyushu Institute of technlogy (Kyutech)
2nd Author's Name Noriyuki Kushiro  
2nd Author's Affiliation Kyushu Institute of technlogy (Kyutech)
3rd Author's Name  
3rd Author's Affiliation ()
4th Author's Name  
4th Author's Affiliation ()
5th Author's Name  
5th Author's Affiliation ()
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
21st Author's Name  
21st Author's Affiliation ()
22nd Author's Name  
22nd Author's Affiliation ()
23rd Author's Name  
23rd Author's Affiliation ()
24th Author's Name  
24th Author's Affiliation ()
25th Author's Name  
25th Author's Affiliation ()
26th Author's Name / /
26th Author's Affiliation ()
()
27th Author's Name / /
27th Author's Affiliation ()
()
28th Author's Name / /
28th Author's Affiliation ()
()
29th Author's Name / /
29th Author's Affiliation ()
()
30th Author's Name / /
30th Author's Affiliation ()
()
31st Author's Name / /
31st Author's Affiliation ()
()
32nd Author's Name / /
32nd Author's Affiliation ()
()
33rd Author's Name / /
33rd Author's Affiliation ()
()
34th Author's Name / /
34th Author's Affiliation ()
()
35th Author's Name / /
35th Author's Affiliation ()
()
36th Author's Name / /
36th Author's Affiliation ()
()
Speaker Author-1 
Date Time 2015-12-04 15:55:00 
Presentation Time 20 minutes 
Registration for AI 
Paper # AI2015-23 
Volume (vol) vol.115 
Number (no) no.337 
Page pp.61-66 
#Pages 6 
Date of Issue 2015-11-27 (AI) 

[Return to Top Page]

[Return to IEICE Web Page]
The Institute of Electronics, Information and Communication Engineers (IEICE), Japan