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Paper Abstract and Keywords
Presentation 2016-01-22 13:55
Fabrication of highly reliable Co(W) thin film by physical vapor deposition for next generation ULSI Cu interconnects
Taewoong Kim, Kouta Tomita, Takeshi Momose (Univ. of Tokyo), Takaaki Tsunoda, Takayuki Moriwaki (CANON ANELVA), Yukihiro Shimogaki (Univ. of Tokyo) SDM2015-114
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 115, no. 417, SDM2015-114, pp. 25-28, Jan. 2016.
Paper # SDM2015-114 
Date of Issue 2016-01-15 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2016-01-22 - 2016-01-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Sanjo Conference Hall, The University of Tokyo 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Interconnects, Package and related materials 
Paper Information
Registration To SDM 
Conference Code 2016-01-SDM 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of highly reliable Co(W) thin film by physical vapor deposition for next generation ULSI Cu interconnects 
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1st Author's Name Taewoong Kim  
1st Author's Affiliation The University of Tokyo (Univ. of Tokyo)
2nd Author's Name Kouta Tomita  
2nd Author's Affiliation The University of Tokyo (Univ. of Tokyo)
3rd Author's Name Takeshi Momose  
3rd Author's Affiliation The University of Tokyo (Univ. of Tokyo)
4th Author's Name Takaaki Tsunoda  
4th Author's Affiliation CANON ANELVA CORPORATION (CANON ANELVA)
5th Author's Name Takayuki Moriwaki  
5th Author's Affiliation CANON ANELVA CORPORATION (CANON ANELVA)
6th Author's Name Yukihiro Shimogaki  
6th Author's Affiliation The University of Tokyo (Univ. of Tokyo)
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Speaker Author-1 
Date Time 2016-01-22 13:55:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2015-114 
Volume (vol) vol.115 
Number (no) no.417 
Page pp.25-28 
#Pages 4 
Date of Issue 2016-01-15 (SDM) 

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