Paper Abstract and Keywords |
Presentation |
2016-01-28 15:04
Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors
-- Effects of substrate bias during the plasma treatment of IGZO. -- Yusaku Magari, Tatsuya Toda, Hisao Makino, Mamoru Furuta (Kochi Univ. of Technol.) EID2015-31 Link to ES Tech. Rep. Archives: EID2015-31 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 115, no. 439, EID2015-31, pp. 41-44, Jan. 2016. |
Paper # |
EID2015-31 |
Date of Issue |
2016-01-21 (EID) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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EID2015-31 Link to ES Tech. Rep. Archives: EID2015-31 |
Conference Information |
Committee |
EID ITE-IDY IEE-EDD SID-JC IEIJ-SSL |
Conference Date |
2016-01-28 - 2016-01-29 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Toyama Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Joint Meeting of Emissive / Non-Emissive Displays |
Paper Information |
Registration To |
EID |
Conference Code |
2016-01-EID-IDY-EDD-JC-SSL |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors |
Sub Title (in English) |
Effects of substrate bias during the plasma treatment of IGZO. |
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1st Author's Name |
Yusaku Magari |
1st Author's Affiliation |
Kochi University of Technology (Kochi Univ. of Technol.) |
2nd Author's Name |
Tatsuya Toda |
2nd Author's Affiliation |
Kochi University of Technology (Kochi Univ. of Technol.) |
3rd Author's Name |
Hisao Makino |
3rd Author's Affiliation |
Kochi University of Technology (Kochi Univ. of Technol.) |
4th Author's Name |
Mamoru Furuta |
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Kochi University of Technology (Kochi Univ. of Technol.) |
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Speaker |
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Date Time |
2016-01-28 15:04:00 |
Presentation Time |
8 minutes |
Registration for |
EID |
Paper # |
EID2015-31 |
Volume (vol) |
vol.115 |
Number (no) |
no.439 |
Page |
pp.41-44 |
#Pages |
4 |
Date of Issue |
2016-01-21 (EID) |