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Paper Abstract and Keywords
Presentation 2016-01-28 15:04
Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors -- Effects of substrate bias during the plasma treatment of IGZO. --
Yusaku Magari, Tatsuya Toda, Hisao Makino, Mamoru Furuta (Kochi Univ. of Technol.) EID2015-31 Link to ES Tech. Rep. Archives: EID2015-31
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 115, no. 439, EID2015-31, pp. 41-44, Jan. 2016.
Paper # EID2015-31 
Date of Issue 2016-01-21 (EID) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EID2015-31 Link to ES Tech. Rep. Archives: EID2015-31

Conference Information
Committee EID ITE-IDY IEE-EDD SID-JC IEIJ-SSL  
Conference Date 2016-01-28 - 2016-01-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Toyama Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Joint Meeting of Emissive / Non-Emissive Displays 
Paper Information
Registration To EID 
Conference Code 2016-01-EID-IDY-EDD-JC-SSL 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors 
Sub Title (in English) Effects of substrate bias during the plasma treatment of IGZO. 
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1st Author's Name Yusaku Magari  
1st Author's Affiliation Kochi University of Technology (Kochi Univ. of Technol.)
2nd Author's Name Tatsuya Toda  
2nd Author's Affiliation Kochi University of Technology (Kochi Univ. of Technol.)
3rd Author's Name Hisao Makino  
3rd Author's Affiliation Kochi University of Technology (Kochi Univ. of Technol.)
4th Author's Name Mamoru Furuta  
4th Author's Affiliation Kochi University of Technology (Kochi Univ. of Technol.)
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Date Time 2016-01-28 15:04:00 
Presentation Time 8 minutes 
Registration for EID 
Paper # EID2015-31 
Volume (vol) vol.115 
Number (no) no.439 
Page pp.41-44 
#Pages
Date of Issue 2016-01-21 (EID) 


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