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Paper Abstract and Keywords
Presentation 2017-08-09 13:55
Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity
Toshiaki Takahashi, Takeshi Hizawa (TUT), Nobuo Misawa (KAST), Miki Taki (TUT), Kazuaki Sawada, Kazuhiro Takahashi (TUT/JST) ED2017-28
Abstract (in Japanese) (See Japanese page) 
(in English) For detecting unlabeled biomarkers in blood with high sensitivity, we have proposed a biosensor using a MEMS optical interferometer. When the target molecule is adsorbed by the antigen-antibody reaction onto movable membrane which plays a role as a upper mirror of the optical interferometer, the amount of deformation of the movable membrane displaced by the change of surface stress can be detected with high sensitivity. In order to improve the limit of detection of this biosensor, we fabricated and evaluated a high wavelength selective MEMS optical interferometric sensor with metal half-mirrors with high reflectance. The proposed structure employed a 50 nm thick Au half mirror deposited on the mirror surface of the optical interferometer for high wavelength selectivity, and the signal conversion efficiency improved to be 6.6 times. Also, the peak shift on reflection spectrum due to the BSA antigen-antibody reaction was spectroscopically measured on the fabricated optical interferometer, the deformation amount of 7.2 times was obtained at 15 minutes as compared with the deformed amount of the movable membrane in a solution without the BSA antigen. This result indicated the target antigen molecule can be selectively detected.
Keyword (in Japanese) (See Japanese page) 
(in English) Fabry-Perot interferometer / Au half-mirror / Antigen Antibody reaction / Biosensor / Wavelength selectivity / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 172, ED2017-28, pp. 5-8, Aug. 2017.
Paper # ED2017-28 
Date of Issue 2017-08-02 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2017-28

Conference Information
Committee ED  
Conference Date 2017-08-09 - 2017-08-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Sensor, MEMS, general 
Paper Information
Registration To ED 
Conference Code 2017-08-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication and evaluation of MEMS optical interferometric biosensor with high wavelength selectivity 
Sub Title (in English)  
Keyword(1) Fabry-Perot interferometer  
Keyword(2) Au half-mirror  
Keyword(3) Antigen Antibody reaction  
Keyword(4) Biosensor  
Keyword(5) Wavelength selectivity  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Toshiaki Takahashi  
1st Author's Affiliation Toyohashi University of Technology (TUT)
2nd Author's Name Takeshi Hizawa  
2nd Author's Affiliation Toyohashi University of Technology (TUT)
3rd Author's Name Nobuo Misawa  
3rd Author's Affiliation Kanagawa Academy of Science and Technology (KAST)
4th Author's Name Miki Taki  
4th Author's Affiliation Toyohashi University of Technology (TUT)
5th Author's Name Kazuaki Sawada  
5th Author's Affiliation Toyohashi University of Technology/JST-CREST (TUT/JST)
6th Author's Name Kazuhiro Takahashi  
6th Author's Affiliation Toyohashi University of Technology/JST-PRESTO (TUT/JST)
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Speaker Author-1 
Date Time 2017-08-09 13:55:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2017-28 
Volume (vol) vol.117 
Number (no) no.172 
Page pp.5-8 
#Pages 4 
Date of Issue 2017-08-02 (ED) 

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