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Paper Abstract and Keywords
Presentation 2017-10-26 10:20
A High Sensitivity Realtime Compact Gas Concentration Sensor using UV absorption spectroscopy and Charge Amplifier Circuit
Hidekazu Ishii (Tohoku Univ.), Masaaki Nagase, Nobukazu Ikeda (Fujikin Inc.), Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.) SDM2017-56 Link to ES Tech. Rep. Archives: SDM2017-56
Abstract (in Japanese) (See Japanese page) 
(in English) Metal organic (MO) gases are used in electronic device manufacturing processes such as semiconductors, power devices, LEDs, displays. It is usually controlled by in-line gas concentration sensor in the concentration control of the supply gas. However, due to the advancement of manufacturing process, a gas concentration sensor capable of monitoring a wide range of concentration measurements in real time with high sensitivity and high accuracy is required. Until now, gas concentration sensor of the ultrasonic method and the near infrared absorption method have been used, but there are some issues with versatility and sensitivity. In our research, based on the light absorption characteristics of MO gases in the ultraviolet light region of 400 nm or less in wavelength, we investigated concentration measurement by ultraviolet absorbance measurement method. A prototype compact unit that adopts a high seal gas cell was manufactured, and a detection circuit section was made by adopting a charge amplifier method that can measure high sensitivity, rather than a transimpedance amplifier method that is usually used for the detection circuit section. In the evaluation by the commonly used metal organic gas material. Compared to the ultrasonic method and the near infrared absorbance measurement method, it was demonstrated that the developed sensor is compact, and it has high sensitivity and real-time concentration measurement capability with response time of less than 1 sec.
Keyword (in Japanese) (See Japanese page) 
(in English) gas concentration sensor / charge amplifier circuit / metal organic gas / / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 260, SDM2017-56, pp. 35-38, Oct. 2017.
Paper # SDM2017-56 
Date of Issue 2017-10-18 (SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2017-56 Link to ES Tech. Rep. Archives: SDM2017-56

Conference Information
Committee SDM  
Conference Date 2017-10-25 - 2017-10-26 
Place (in Japanese) (See Japanese page) 
Place (in English) Niche, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and New Process Technology 
Paper Information
Registration To SDM 
Conference Code 2017-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A High Sensitivity Realtime Compact Gas Concentration Sensor using UV absorption spectroscopy and Charge Amplifier Circuit 
Sub Title (in English)  
Keyword(1) gas concentration sensor  
Keyword(2) charge amplifier circuit  
Keyword(3) metal organic gas  
1st Author's Name Hidekazu Ishii  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Masaaki Nagase  
2nd Author's Affiliation Fujikin Inc. (Fujikin Inc.)
3rd Author's Name Nobukazu Ikeda  
3rd Author's Affiliation Fujikin Inc. (Fujikin Inc.)
4th Author's Name Yoshinobu Shiba  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Yasuyuki Shirai  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Rihito Kuroda  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Shigetoshi Sugawa  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
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Date Time 2017-10-26 10:20:00 
Presentation Time 30 
Registration for SDM 
Paper # SDM2017-56 
Volume (vol) 117 
Number (no) no.260 
Page pp.35-38 
Date of Issue 2017-10-18 (SDM) 

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