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Paper Abstract and Keywords
Presentation 2017-12-22 13:45
Three-dimension periodic nano-structure fabricated by proximity nano-patterning process (PnP)
Xudongfang Wang, Yasuaki Ishikawa, Shinji Araki, Yukiharu Uraoka (NAIST), Seokwoo Jeon (KAIST) EID2017-18 SDM2017-79
Abstract (in Japanese) (See Japanese page) 
(in English) In recent years, 3D periodic nanostructure have attracted considerable interest because of its excellent performance and can be a variety of applications such as phononic crystals. Large area, nanoshell-based 3D structures can be easily fabricated using a photoresist templating process. However, conventional nanostructures require a low-throughput process which is complicated and expensive process. One emerging solution to address this problem is called proximity field nanopatterning (PnP). The infiltration processes use liquid ZnO for a nanoshell-based 3D periodic structure with high structural flexibility and controllability. Consequently, clearly formed nanostructures were fabricated by using a photoresists called KMPR. Both of these could lead to further development toward nanoshell-based 3D structures for various applications.
Keyword (in Japanese) (See Japanese page) 
(in English) Proximity field nanopatterning (PnP) / Three-dimensional (3D) / Nanoshell-based structure / / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 373, SDM2017-79, pp. 35-38, Dec. 2017.
Paper # SDM2017-79 
Date of Issue 2017-12-15 (EID, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EID2017-18 SDM2017-79

Conference Information
Committee SDM EID  
Conference Date 2017-12-22 - 2017-12-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyoto University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Si, Si-related materials, device process, electron devices, and display technology 
Paper Information
Registration To SDM 
Conference Code 2017-12-SDM-EID 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Three-dimension periodic nano-structure fabricated by proximity nano-patterning process (PnP) 
Sub Title (in English)  
Keyword(1) Proximity field nanopatterning (PnP)  
Keyword(2) Three-dimensional (3D)  
Keyword(3) Nanoshell-based structure  
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1st Author's Name Xudongfang Wang  
1st Author's Affiliation Nara institute of Science and Technology university (NAIST)
2nd Author's Name Yasuaki Ishikawa  
2nd Author's Affiliation Nara institute of Science and Technology university (NAIST)
3rd Author's Name Shinji Araki  
3rd Author's Affiliation Nara institute of Science and Technology university (NAIST)
4th Author's Name Yukiharu Uraoka  
4th Author's Affiliation Nara institute of Science and Technology university (NAIST)
5th Author's Name Seokwoo Jeon  
5th Author's Affiliation Korea advanced institute of science and technology university (KAIST)
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Speaker Author-1 
Date Time 2017-12-22 13:45:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # EID2017-18, SDM2017-79 
Volume (vol) vol.117 
Number (no) no.372(EID), no.373(SDM) 
Page pp.35-38 
#Pages 4 
Date of Issue 2017-12-15 (EID, SDM) 

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