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Paper Abstract and Keywords
Presentation 2018-02-08 13:10
[Invited Talk] A Novel Role for SiCN to Suppress H2O Outgas from TEOS oxide films in wafer bonding
Michinari Tetani, Yasunori Morinaga, Masakazu Hamada, Masahiko Takeuchi, Shinji Uya, Hisashi Yano, Naoaki Sato, Susumu Matsumoto (TPSCo) SDM2017-99
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 429, SDM2017-99, pp. 11-14, Feb. 2018.
Paper # SDM2017-99 
Date of Issue 2018-02-01 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2018-02-08 - 2018-02-08 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokyo Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2018-02-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A Novel Role for SiCN to Suppress H2O Outgas from TEOS oxide films in wafer bonding 
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1st Author's Name Michinari Tetani  
1st Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
2nd Author's Name Yasunori Morinaga  
2nd Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
3rd Author's Name Masakazu Hamada  
3rd Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
4th Author's Name Masahiko Takeuchi  
4th Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
5th Author's Name Shinji Uya  
5th Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
6th Author's Name Hisashi Yano  
6th Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
7th Author's Name Naoaki Sato  
7th Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
8th Author's Name Susumu Matsumoto  
8th Author's Affiliation TowerJazz Panasonic Semiconductor (TPSCo)
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Speaker Author-1 
Date Time 2018-02-08 13:10:00 
Presentation Time 40 minutes 
Registration for SDM 
Paper # SDM2017-99 
Volume (vol) vol.117 
Number (no) no.429 
Page pp.11-14 
#Pages 4 
Date of Issue 2018-02-01 (SDM) 

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