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Paper Abstract and Keywords
Presentation 2018-08-09 13:25
Kinetic inductance in superconducting TiN coplanar waveguide resonator
Wei Qiu, Hirotaka Terai (NICT) SCE2018-10
Abstract (in Japanese) (See Japanese page) 
(in English) Precision design and fabrication of high quality superconducting quantum qubit (qubit) are both essential requirements for physical implantation such devices in quantum computing and quantum information applications. Among which, we have demonstrated low-loss coplanar waveguide resonator (CPWR) made of superconducting TiN films. In this research report, we evaluate the kinetic inductance Lk in such device by measuring the resonance shift. It shows that both kinetic inductance Lk and London penetration depth $lamda$ are highly dependent on the deposition condition of the TiN film. In comparison, CPW resonator made of (200)-oriented TiN film shows much smaller shift in resonant frequency due to its smaller kinetic inductance contribution than polycrystalline TiN. Meanwhile, we also evaluate the penetration depth from resonator geometric configurations.
Keyword (in Japanese) (See Japanese page) 
(in English) Titanium nitrite / Kinetic Inductance / Penetration depth / Coplanar waveguide resonator / Superconducting qubit / / /  
Reference Info. IEICE Tech. Rep., vol. 118, no. 178, SCE2018-10, pp. 19-22, Aug. 2018.
Paper # SCE2018-10 
Date of Issue 2018-08-02 (SCE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SCE2018-10

Conference Information
Committee SCE  
Conference Date 2018-08-09 - 2018-08-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Toyohashi University of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Detector, SQUID, etc. 
Paper Information
Registration To SCE 
Conference Code 2018-08-SCE 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Kinetic inductance in superconducting TiN coplanar waveguide resonator 
Sub Title (in English)  
Keyword(1) Titanium nitrite  
Keyword(2) Kinetic Inductance  
Keyword(3) Penetration depth  
Keyword(4) Coplanar waveguide resonator  
Keyword(5) Superconducting qubit  
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Keyword(7)  
Keyword(8)  
1st Author's Name Wei Qiu  
1st Author's Affiliation National Institute of Information and Communications Technology (NICT)
2nd Author's Name Hirotaka Terai  
2nd Author's Affiliation National Institute of Information and Communications Technology (NICT)
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Speaker Author-1 
Date Time 2018-08-09 13:25:00 
Presentation Time 25 minutes 
Registration for SCE 
Paper # SCE2018-10 
Volume (vol) vol.118 
Number (no) no.178 
Page pp.19-22 
#Pages 4 
Date of Issue 2018-08-02 (SCE) 


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