Paper Abstract and Keywords |
Presentation |
2018-10-04 11:15
Comparison between new kt2 extraction method and conventional methods for film/substrate structure
-- Resonant frequency ratio method, conversion loss method, resonant spectrum method, and resonance antiresonance method -- Makoto Totsuka, Takahiko Yanagitani (Waseda Univ.) US2018-52 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The electromechanical coupling coefficient kt2 is an important parameter for determining the performances of the RF piezoelectric devices. A resonance antiresonance method is recommended for the determination of kt2 for the piezoelectric film, according to the IEEE standard. However, a self-standing film structure (FBAR) is required to use this method. It is convenient to estimate the kt2 of piezoelectric film in film/substrate structure (HBAR) before preparing piezoelectric devices. In this study, we proposed the kt2 determination method by using the ratio of a third mode resonant frequency to a fundamental mode resonant frequency in HBAR. We compared this method with conventional methods to demonstrate the validity of this method. The difference between kt2 determined by this method and one by the resonance antiresonance method is within 7%. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Electromechanical coupling coefficient / HBAR / Piezoelectric film / Resonant frequency / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 118, no. 229, US2018-52, pp. 19-24, Oct. 2018. |
Paper # |
US2018-52 |
Date of Issue |
2018-09-27 (US) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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US2018-52 |
Conference Information |
Committee |
US |
Conference Date |
2018-10-04 - 2018-10-04 |
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Paper Information |
Registration To |
US |
Conference Code |
2018-10-US |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Comparison between new kt2 extraction method and conventional methods for film/substrate structure |
Sub Title (in English) |
Resonant frequency ratio method, conversion loss method, resonant spectrum method, and resonance antiresonance method |
Keyword(1) |
Electromechanical coupling coefficient |
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HBAR |
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Piezoelectric film |
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Resonant frequency |
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1st Author's Name |
Makoto Totsuka |
1st Author's Affiliation |
Waseda Univesity (Waseda Univ.) |
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Takahiko Yanagitani |
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Waseda Univesity (Waseda Univ.) |
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Speaker |
Author-1 |
Date Time |
2018-10-04 11:15:00 |
Presentation Time |
25 minutes |
Registration for |
US |
Paper # |
US2018-52 |
Volume (vol) |
vol.118 |
Number (no) |
no.229 |
Page |
pp.19-24 |
#Pages |
6 |
Date of Issue |
2018-09-27 (US) |
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