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Paper Abstract and Keywords
Presentation 2018-10-04 12:40
Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators
Yui Yamakawa, Takumi Soutome, Rei Karasawa, Takahiko Yanagitani (Waseda Univ.) US2018-53
Abstract (in Japanese) (See Japanese page) 
(in English) In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required to be thinned to improve the measurement sensitivity. The QCM, however, becomes to be fragile due to thinning. Sensitive measurement without cracking of the piezoelectric layer can be expected by using the SMR (Solidly Mounted Resonator). In the previous study, however, the quasi-shear mode electromechanical coupling k’15 was only 1.7%. Therefore, we propose the fluid viscosity evaluation with the SMR based on the c-axis tilted ScAlN thin film. k’15^2 of the 48° c-axis tilted ScAlN film is determined as 13.0%. In addition, anti-resonant frequency shifts with changing in glycerin concentration were observed.
Keyword (in Japanese) (See Japanese page) 
(in English) Viscosity sensor / ScAlN film / TSM / QCM / / / /  
Reference Info. IEICE Tech. Rep., vol. 118, no. 229, US2018-53, pp. 25-29, Oct. 2018.
Paper # US2018-53 
Date of Issue 2018-09-27 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee US  
Conference Date 2018-10-04 - 2018-10-04 
Place (in Japanese) (See Japanese page) 
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Paper Information
Registration To US 
Conference Code 2018-10-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators 
Sub Title (in English)  
Keyword(1) Viscosity sensor  
Keyword(2) ScAlN film  
Keyword(3) TSM  
Keyword(4) QCM  
1st Author's Name Yui Yamakawa  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takumi Soutome  
2nd Author's Affiliation Waseda University (Waseda Univ.)
3rd Author's Name Rei Karasawa  
3rd Author's Affiliation Waseda University (Waseda Univ.)
4th Author's Name Takahiko Yanagitani  
4th Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2018-10-04 12:40:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2018-53 
Volume (vol) vol.118 
Number (no) no.229 
Page pp.25-29 
Date of Issue 2018-09-27 (US) 

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