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| Presentation | 2018-10-04 12:40 Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators Yui Yamakawa, Takumi Soutome, Rei Karasawa, Takahiko Yanagitani (Waseda Univ.)  US2018-53 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required to be thinned to improve the measurement sensitivity. The QCM, however, becomes to be fragile due to thinning. Sensitive measurement without cracking of the piezoelectric layer can be expected by using the SMR (Solidly Mounted Resonator). In the previous study, however, the quasi-shear mode electromechanical coupling k’15 was only 1.7%. Therefore, we propose the fluid viscosity evaluation with the SMR based on the c-axis tilted ScAlN thin film. k’15^2 of the 48° c-axis tilted ScAlN film is determined as 13.0%. In addition, anti-resonant frequency shifts with changing in glycerin concentration were observed. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Viscosity sensor / ScAlN film / TSM / QCM / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 118, no. 229, US2018-53, pp. 25-29, Oct. 2018. | |
| Paper # | US2018-53 | |
| Date of Issue | 2018-09-27 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2018-53 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2018-10-04 - 2018-10-04 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | US |
| Conference Code | 2018-10-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators |
| Sub Title (in English) | |
| Keyword(1) | Viscosity sensor |
| Keyword(2) | ScAlN film |
| Keyword(3) | TSM |
| Keyword(4) | QCM |
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| 1st Author's Name | Yui Yamakawa |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Takumi Soutome |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
| 3rd Author's Name | Rei Karasawa |
| 3rd Author's Affiliation | Waseda University (Waseda Univ.) |
| 4th Author's Name | Takahiko Yanagitani |
| 4th Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2018-10-04 12:40:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2018-53 |
| Volume (vol) | vol.118 |
| Number (no) | no.229 |
| Page | pp.25-29 |
| #Pages | 5 |
| Date of Issue | 2018-09-27 (US) |
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